发明公开
- 专利标题： Method of manufacturing a device whereby a substance is implanted into a body
- 专利标题（中）： 一种将物质植入身体的装置的制造方法
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申请号： EP92202812.1申请日： 1992-09-15
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公开(公告)号： EP0534530A3公开(公告)日： 1996-08-28
- 发明人: Oostra, Doeke Jolt , Ouwerling, Gerardus Johannes Leendert , Ottenheim, Jozef Jacobus Maria , Van Rooij-Mulder, Johanna Maria Lambertina
- 申请人： Philips Electronics N.V.
- 申请人地址： Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人： Philips Electronics N.V.
- 当前专利权人： Philips Electronics N.V.
- 当前专利权人地址： Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构： Veerman, Jan Willem
- 优先权： EP91202455 19910923
- 主分类号： H01L21/265
- IPC分类号： H01L21/265 ; H01L21/266 ; H01L21/74 ; H01L21/335 ; H01L21/331 ; H05B33/00 ; G02B6/12
摘要：
A method of manufacturing a device, preferably a semiconductor device, whereby a mask (3) with an opening (4) extending down to a bare body (1) is provided on a surface (2) of this body (1), after which a substance (5) is implanted into the body (1) through the opening (4), upon which the mask (3) is removed. According to the invention, the mask (3) is provided in that subsequently a first and a second layer (6, 7, respectively) are deposited on the surface (2) and these layers are provided with the opening (4), while the first layer (6) can be selectively removed relative to the material of the body (1) and the second layer (7) comprises the same material as the body (1). Since the same material is used for the second layer (7) as for the body (1), according to the invention, it is achieved that the body (1) is not polluted with material from the mask (3) in the opening (4) during implantation.
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