发明公开
EP0548926A1 Apparatus for vaporizing liquid raw material and apparatus for forming thin film
失效
一种用于液体原料和设备形成薄膜的蒸发。
- 专利标题： Apparatus for vaporizing liquid raw material and apparatus for forming thin film
- 专利标题（中）： 一种用于液体原料和设备形成薄膜的蒸发。
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申请号： EP92121821.0申请日： 1992-12-22
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公开(公告)号： EP0548926A1公开(公告)日： 1993-06-30
- 发明人: Tsubouchi, Kazuo , Masu, Kazuya
- 申请人： Tsubouchi, Kazuo
- 申请人地址： 30-38 Hitokita 2-chome, Taihaku-ku Sendai-shi, Miyagi-ken JP
- 专利权人： Tsubouchi, Kazuo
- 当前专利权人： Tsubouchi, Kazuo
- 当前专利权人地址： 30-38 Hitokita 2-chome, Taihaku-ku Sendai-shi, Miyagi-ken JP
- 代理机构： Tiedtke, Harro, Dipl.-Ing.
- 优先权： JP344869/91 19911226
- 主分类号： C23C16/44
- IPC分类号： C23C16/44 ; B01D1/16 ; B01D1/14 ; B01D3/06
摘要：
An apparatus for vaporizing a liquid raw material (2) comprises a nozzle (4) with an open tip end for ejecting a liquid raw material into a heated gas (31) atmosphere as liquid droplets and a heated plate (30) with a small opening (40) disposed in front of the nozzle, a space opposite to that occupied by the nozzle with respect to the plate being evacuated.
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