发明公开
EP0593216A3 Transmission electron microscope and its use 失效
传输电子显微镜及其使用

  • 专利标题: Transmission electron microscope and its use
  • 专利标题(中): 传输电子显微镜及其使用
  • 申请号: EP93308004.6
    申请日: 1993-10-07
  • 公开(公告)号: EP0593216A3
    公开(公告)日: 1994-06-08
  • 发明人: Takahashi, YoshioYajima, Yusuke
  • 申请人: HITACHI, LTD.
  • 申请人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
  • 专利权人: HITACHI, LTD.
  • 当前专利权人: HITACHI, LTD.
  • 当前专利权人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
  • 代理机构: Calderbank, Thomas Roger
  • 优先权: JP274041/92 19921013; JP133109/93 19930603
  • 主分类号: H01J37/26
  • IPC分类号: H01J37/26 G01R33/02
Transmission electron microscope and its use
摘要:
When observing a magnetization image on a magnetic thin film by means of a scanning transmission electron microscope, the effect of a stray magnetic field is made smaller than that of a magnetization in order to produce a clear magnetic structure of the magnetization image. In order to reduce the effect of the stray magnetic field in comparison to that of the magnetization, the invention provides a scanning transmission electron microscope equipped with a specimen-holder driving means which can rotate the surface of a specimen 5 preferably by more than 90 degrees with an axis parallel to the optical path of an electron beam 1 taken as a center and incline the surface of the specimen 5 around a center axis 22 perpendicular to an axis 24 rotated earlier over the surface of the specimen 5 with respect to a magnetic-recording track direction and also perpendicular to the axis parallel to the optical path of the electron beam 1. The invention also provides a magnetic-recording image observing method and an image processing method.
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