发明公开
- 专利标题： Device for removing dissolved gas from a liquid
- 专利标题（中）： 用于从液体中去除溶解的气体的设备。
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申请号： EP93202864.0申请日： 1993-10-11
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公开(公告)号： EP0598424A2公开(公告)日： 1994-05-25
- 发明人: van Schravendijk, Bart J. , Burkhart, Christopher W. , Santiago, Tito H. , Pomeroy, Charles E. , Lind, Jeffrey W.
- 申请人： NOVELLUS SYSTEMS, INC.
- 申请人地址： 81 Vista Montana San Jose, CA 95134 US
- 专利权人： NOVELLUS SYSTEMS, INC.
- 当前专利权人： NOVELLUS SYSTEMS, INC.
- 当前专利权人地址： 81 Vista Montana San Jose, CA 95134 US
- 代理机构： Van kan, Johan Joseph Hubert, Ir.
- 优先权： US978216 19921116
- 主分类号： C23C16/44
- IPC分类号： C23C16/44 ; C23C16/50 ; B01D19/00
摘要：
An apparatus and a method for delivering a liquid are disclosed. The liquid (113) is contained in a vessel (111) is subjected to a pressurized gas (110). Any pressurized gas dissolved in the liquid is removed in a degas module (115) by passing the liquid through a gas permeable tube (120) subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller (122).
公开/授权文献
- EP0598424A3 Device for removing dissolved gas from a liquid 公开/授权日：1996-05-15
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