发明公开
EP0599278A1 Process for the preparation of partially-substituted fluorosilane
失效
维斯特伐利亚州赫尔斯特朗伊斯兰德（Tilsubstituierten Fluorosilans）。
- 专利标题： Process for the preparation of partially-substituted fluorosilane
- 专利标题（中）： 维斯特伐利亚州赫尔斯特朗伊斯兰德（Tilsubstituierten Fluorosilans）。
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申请号： EP93118847.8申请日： 1993-11-24
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公开(公告)号： EP0599278A1公开(公告)日： 1994-06-01
- 发明人: Aritsuka, Makoto , Mimoto, Atsuhisa , Harada, Isao
- 申请人： MITSUI TOATSU CHEMICALS, Inc.
- 申请人地址： 2-5 Kasumigaseki 3-chome Chiyoda-Ku Tokyo 100 JP
- 专利权人： MITSUI TOATSU CHEMICALS, Inc.
- 当前专利权人： MITSUI TOATSU CHEMICALS, Inc.
- 当前专利权人地址： 2-5 Kasumigaseki 3-chome Chiyoda-Ku Tokyo 100 JP
- 代理机构： Schüler, Horst, Dr.
- 优先权： JP318816/92 19921127
- 主分类号： C01B33/107
- IPC分类号： C01B33/107 ; C01G9/04
摘要：
A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiH n F 4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane into the partially-substituted fluorosilane by halogen replacement while using a fluorinating agent. The fluorinating agent is anhydrous zinc fluoride having at least 500 Å in terms of the size of crystallites of the (110) plane.
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