发明公开
EP0601823A1 Field effect transistor with integrated schottky diode clamp
失效
Feldeffekttransistor mit integrierter肖特基 - 克拉默二极管。
- 专利标题: Field effect transistor with integrated schottky diode clamp
- 专利标题(中): Feldeffekttransistor mit integrierter肖特基 - 克拉默二极管。
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申请号: EP93309789.1申请日: 1993-12-06
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公开(公告)号: EP0601823A1公开(公告)日: 1994-06-15
- 发明人: Mistry, Kaizad R.
- 申请人: DIGITAL EQUIPMENT CORPORATION
- 申请人地址: 146 Main Street Maynard, Massachusetts 01745 US
- 专利权人: DIGITAL EQUIPMENT CORPORATION
- 当前专利权人: DIGITAL EQUIPMENT CORPORATION
- 当前专利权人地址: 146 Main Street Maynard, Massachusetts 01745 US
- 代理机构: Goodman, Christopher
- 优先权: US988187 19921209
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L29/56
摘要:
A MOSFET device is constructed with an integrated Schottky diode clamp connected between the source or drain terminal and the bulk terminal. In an illustrative implementation, one or more MOSFETs are formed in an n-well located in a p-type silicon substrate. Each drain is formed by a p+ region underlying a portion of a metal-silicide layer. In one embodiment, the p+ region underlies an edge of the metal-silicide; in another embodiment, the p+ region underlies opposing edges of the metal-silicide, such that a portion of the metal-silicide contacts the n-well. Each source is formed by a p+ region underlying a layer of metal-silicide. Each gate includes a layer of p+ or n+ polycrystalline silicon clad with a layer of metal-silicide, the gates being separated from the n-well by a layer of oxide. In comparison to p-n junction diodes, the integrated Schottky diodes more effectively limit excess voltages applied to MOSFETs. The clamping performed by the invention reduces wearout and other deleterious effects of excess voltage.
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