发明公开
EP0622621A2 Opposed magnet ionization gauge
失效
Ionisationswandler mit sich gegenuberliegenden Magneten。
- 专利标题： Opposed magnet ionization gauge
- 专利标题（中）： Ionisationswandler mit sich gegenuberliegenden Magneten。
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申请号： EP94301848.1申请日： 1994-03-15
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公开(公告)号： EP0622621A2公开(公告)日： 1994-11-02
- 发明人: Drubetsky, Emil , Taylor, Donald R., Jr.
- 申请人： THE FREDERICKS COMPANY
- 申请人地址： 2400 Philmont Avenue Huntingdon Valley, Pennsylvania 19006 US
- 专利权人： THE FREDERICKS COMPANY
- 当前专利权人： THE FREDERICKS COMPANY
- 当前专利权人地址： 2400 Philmont Avenue Huntingdon Valley, Pennsylvania 19006 US
- 代理机构： W.P. THOMPSON & CO.
- 优先权： US54336 19930428
- 主分类号： G01L21/34
- IPC分类号： G01L21/34 ; H01J41/06
摘要：
A cold cathode ionization gauge includes a first electrode (12) and a second electrode (20) which are spaced apart and insulated from one another and have a common axis. A magnetic field generator surrounds the gauge and applies a magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets (32, 34) adjacent to each other. The magnet arrangement minimizes magnetic flux outside the gauge while increasing the strength of the magnetic flux inside the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
公开/授权文献
- EP0622621B1 Opposed magnet ionization gauge 公开/授权日：1998-07-15
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