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公开(公告)号：EP3803934B1
公开(公告)日：2024-03-27
申请号：EP19730606.1
申请日：2019-05-21
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公开(公告)号：EP4031846A1
公开(公告)日：2022-07-27
申请号：EP19774085.5
申请日：2019-09-20
申请人： Inficon AG
发明人： KAISER, Stefan , ANDREAUS, Bernhard
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3.发明公开IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE 审中-公开IONISATIONSMESSGERÄT与电子倍增器冷任务SOURCE
公开(公告)号：EP2232224A4
公开(公告)日：2015-07-01
申请号：EP08868368
申请日：2008-12-17
申请人： MKS INSTR INC
发明人： BRUCKER GERARDO A
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公开(公告)号：EP0622621B1
公开(公告)日：1998-07-15
申请号：EP94301848.1
申请日：1994-03-15
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公开(公告)号：EP0622621A2
公开(公告)日：1994-11-02
申请号：EP94301848.1
申请日：1994-03-15
摘要： A cold cathode ionization gauge includes a first electrode (12) and a second electrode (20) which are spaced apart and insulated from one another and have a common axis. A magnetic field generator surrounds the gauge and applies a magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets (32, 34) adjacent to each other. The magnet arrangement minimizes magnetic flux outside the gauge while increasing the strength of the magnetic flux inside the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
摘要翻译： 冷阴极电离计包括第一电极（12）和第二电极（20），第一电极（12）和第二电极（20）彼此间隔开并且彼此绝缘并具有公共轴线。 磁场发生器围绕测量仪并沿着电极的公共轴施加磁场。 磁场发生器包括彼此相邻的至少一对相对的轴向磁化磁体（32,34）。 磁体布置使仪表外侧的磁通量最小化，同时增加了量规内的磁通量的强度。 磁性装置还允许在非常高的真空中点燃仪表，从而延长量规的工作范围。
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公开(公告)号：EP1853890B1
公开(公告)日：2011-06-15
申请号：EP06707346.0
申请日：2006-03-01
申请人： Inficon GmbH
发明人： KNAPP, Wolfram , WÜEST, Martin
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要： An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (VG) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (VA) and is regulated in such a way that an anode current (IA) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.
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公开(公告)号：EP2247932A1
公开(公告)日：2010-11-10
申请号：EP09714850.6
申请日：2009-02-25
申请人： Inficon GmbH
CPC分类号： G01N33/0009 , G01L21/34 , H01J41/20
摘要： The helium sensor comprises a housing (10) that encloses a detection chamber (11). A side of the housing is closed by a permeable wall (12) that is selective for helium. In the detection chamber (11), there is located an ion getter pump comprising an anode (14), a cathode (15) and a magnetic field (16). According to the invention, the cathode (15), or a cathode side (15a) is made of beryllium. Beryllium has a low atomic weight, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.
摘要翻译： 氦传感器包括包围检测室（11）的壳体（10）。 壳体的一侧由对氦气有选择性的可渗透壁（12）封闭。 在检测室（11）中，设置有包括阳极（14），阴极（15）和磁场（16）的离子吸气泵。 根据本发明，阴极（15）或阴极侧（15a）由铍制成。 铍具有低原子量，由此同样轻质的氦离子可以更好地结合到阴极材料中。
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公开(公告)号：EP1129467B1
公开(公告)日：2008-05-07
申请号：EP99970784.7
申请日：1999-10-13
摘要： During operation of a FTICR MS the time after the opening of the pulsed valve sample gas inlet system that the peak of sample gas pressure occurs in the vacuum chamber is determined by measuring the amplitude of the ion pump current. The FTICR MS then uses that time and the known period of time for which a source of electrons used for an ionization event is energized to energize the electron source so that the known period of time includes the peak of vacuum chamber sample gas pressure. This allows ions to be created during the peak of the sample gas pressure to thereby obtain the maximum sensitivity during measurements.
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公开(公告)号：EP1519401A1
公开(公告)日：2005-03-30
申请号：EP04014545.0
申请日：2004-06-22
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
摘要： The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133') for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.
摘要翻译： 本发明涉及一种用于测量残留在容器（10）中的气态物质的残留压力的电离真空计，更具体地说是在真空泵操作之后。 该仪表包括通过利用纳米管技术制造的电子发射阴极（31），用于加速由阴极发射的电子的栅极（13; 33; 133; 133'）和收集离子的板（15; 35） 和/或气体的电离的正分子。 通过电流计测量板电流允许确定容器内的残余压力的值。
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