发明公开
- 专利标题: Method of manufacturing a transparent conductor pattern and a liquid crystal display device
- 专利标题(中): 用于透明导电图案和液晶显示装置的制备方法。
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申请号: EP93203605.6申请日: 1993-12-21
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公开(公告)号: EP0660381A1公开(公告)日: 1995-06-28
- 发明人: Jacobs, Johannes Wilhelmus Maria , van den Meerakker, Johannes Engelbertus A. M.
- 申请人: Philips Electronics N.V. , FLAT PANEL DISPLAY CO. (FPD) B.V.
- 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人: Philips Electronics N.V.,FLAT PANEL DISPLAY CO. (FPD) B.V.
- 当前专利权人: Philips Electronics N.V.,FLAT PANEL DISPLAY CO. (FPD) B.V.
- 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构: Koppen, Jan
- 主分类号: H01L21/321
- IPC分类号: H01L21/321 ; H01L31/18 ; G02F1/1343
摘要:
For manufacturing an at least substantially transparent conductor pattern or a liquid crystal display device provided with such a conductor pattern, an at least substantially transparent conducting layer (3) and a metal layer (4) are successively provided on a substrate (1) and, while masking with an etching mask (5), exposed to an etching bath. According to the invention, the etching bath contains a first etchant for the metal layer (4) and a second etchant for the underlying transparent conducting layer (3), while the bulk etching rate of the metal layer in the first etchant is smaller than the bulk etching rate of the transparent conducting layer in the second etchant. Thus, a conductor pattern can be obtained which has an eminent pattern and edge definition and bevelled edges whose angle of inclination preferably ranges between 25° and 65°.
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