发明公开
EP0671871A1 APPARARUS AND METHOD FOR PRODUCING GASEOUS IONS BY USE OF X-RAYS, AND VARIOUS APPARATUSES AND STRUCTURES USING THEM
失效
装置及其制造方法的气体离子利用X射线及其在不同设备和结构中的应用。
- 专利标题： APPARARUS AND METHOD FOR PRODUCING GASEOUS IONS BY USE OF X-RAYS, AND VARIOUS APPARATUSES AND STRUCTURES USING THEM
- 专利标题（中）： 装置及其制造方法的气体离子利用X射线及其在不同设备和结构中的应用。
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申请号： EP94908129.3申请日： 1993-08-13
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公开(公告)号： EP0671871A1公开(公告)日： 1995-09-13
- 发明人: OHMI, Tadahiro , INABA, Hitoshi 202 , IKEDO, Tomoyuki
- 申请人： TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA , HAMAMATSU PHOTONICS K.K. , OHMI, Tadahiro
- 申请人地址： 2-8, Kandasurugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 专利权人： TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA,HAMAMATSU PHOTONICS K.K.,OHMI, Tadahiro
- 当前专利权人： TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA,HAMAMATSU PHOTONICS K.K.,OHMI, Tadahiro
- 当前专利权人地址： 2-8, Kandasurugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 代理机构： Weitzel, Wolfgang, Dr.-Ing.
- 优先权： JP216807/92 19920814
- 国际公布： WO9405138 19940303
- 主分类号： H05F3/06
- IPC分类号： H05F3/06 ; H01L21/02 ; H01L21/68 ; A01G7/00 ; E04H5/02
摘要：
An apparatus and method for producing positive and negative ions and/or electrons in a gas of any atmosphere without producing dust, a method and structure for neutralizing a charged body in a short period of time and for completely preventing static electricity from being generated, and various apparatuses and structures, such as a conveyor, wet bench, and clean room, which use the neutralizing method and structure. The gaseous ion producing apparatus produces positive and negative ions and/or electrons in a gas by irradiating, with electromagnetic waves in a soft X-ray region, the gas under a high pressure, atmospheric pressure, or reduced pressure. In the neutralizing structure an X-ray unit is arranged at an appropriate place to apply the electromagnetic waves in a soft X-ray region to the atmospheric gas surrounding a charged body.
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