发明授权
EP0683902B1 VERFAHREN ZUM HERSTELLEN VON MIKROSTRUKTURELEMENTEN AUF EINEM SUBSTRAT 失效
的生产方法微结构构件在衬底的

VERFAHREN ZUM HERSTELLEN VON MIKROSTRUKTURELEMENTEN AUF EINEM SUBSTRAT
摘要:
The invention relates to a process for producing micro-structure components on a substrate bearing electronic circuits co-operating functionally with the micro-structure components. The latter may be made of both synthetic material and metal. According to the invention, a first layer of a synthetic material is applied to the substrate, with which it forms a solid bond. On this layer is applied a second layer of a synthetic material with which an internal separating medium has previously been mixed. The second layer is then embossed with a micro-structured tool. If metal micro-structure components are required, the embossed layer is subsequently galvanically shaped.
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