发明授权
- 专利标题: VERFAHREN ZUM HERSTELLEN VON MIKROSTRUKTURELEMENTEN AUF EINEM SUBSTRAT
- 专利标题(英): Process for producing micro-structure components on a substrate
- 专利标题(中): 的生产方法微结构构件在衬底的
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申请号: EP94905683.2申请日: 1994-01-22
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公开(公告)号: EP0683902B1公开(公告)日: 1998-08-26
- 发明人: MICHEL, Andreas , HARMENING, Michael , BACHER, Walter , BLEY, Peter , RUPRECHT, Robert , BOTH, Alexander
- 申请人: Forschungszentrum Karlsruhe GmbH
- 申请人地址: Weberstrasse 5 76133 Karlsruhe DE
- 专利权人: Forschungszentrum Karlsruhe GmbH
- 当前专利权人: Forschungszentrum Karlsruhe GmbH
- 当前专利权人地址: Weberstrasse 5 76133 Karlsruhe DE
- 代理机构: Rückert, Friedrich, Dr.
- 优先权: DE4304424 19930213
- 国际公布: WO9418605 19940818
- 主分类号: G03F7/00
- IPC分类号: G03F7/00
摘要:
The invention relates to a process for producing micro-structure components on a substrate bearing electronic circuits co-operating functionally with the micro-structure components. The latter may be made of both synthetic material and metal. According to the invention, a first layer of a synthetic material is applied to the substrate, with which it forms a solid bond. On this layer is applied a second layer of a synthetic material with which an internal separating medium has previously been mixed. The second layer is then embossed with a micro-structured tool. If metal micro-structure components are required, the embossed layer is subsequently galvanically shaped.
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