发明公开
EP0686863A1 PLANAR GALVANOMIRROR AND PRODUCTION METHOD THEREFOR
失效
平面设计师GALVANOSPIEGEL UND DESSEN HERSTELLUNGSVERFAHREN
- 专利标题: PLANAR GALVANOMIRROR AND PRODUCTION METHOD THEREFOR
- 专利标题(中): 平面设计师GALVANOSPIEGEL UND DESSEN HERSTELLUNGSVERFAHREN
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申请号: EP95902924.0申请日: 1994-12-08
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公开(公告)号: EP0686863A1公开(公告)日: 1995-12-13
- 发明人: ESASHI, Masayoshi , ASADA, Norihiro, Yono Office The Nippon
- 申请人: THE NIPPON SIGNAL CO. LTD. , ESASHI, Masayoshi
- 申请人地址: 3-1, Marunouchi 3-chome Chiyoda-ku Tokyo 100 JP
- 专利权人: THE NIPPON SIGNAL CO. LTD.,ESASHI, Masayoshi
- 当前专利权人: THE NIPPON SIGNAL CO. LTD.,ESASHI, Masayoshi
- 当前专利权人地址: 3-1, Marunouchi 3-chome Chiyoda-ku Tokyo 100 JP
- 代理机构: Palmer, Roger
- 优先权: JP320524/93 19931220
- 国际公布: WO9517698 19950629
- 主分类号: G02B26/10
- IPC分类号: G02B26/10
摘要:
This invention relates to a thin and compact galvanomirror produced by using semiconductor fabrication technology. A flat movable plate (5) and a torsion bar (6) for rotatably supporting this movable plate (5) are integrally formed on a silicon substrate (2) by using semiconductor fabrication technology, and a flat coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Further, glass substrates (3), (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and permanent magnets (10A, 10B and 11A, 11B) for causing magnetic fields to act on the coil (7) are fixed at predetermined positions of these glass substrates. The rocking angle of the movable plate (5) is varied depending on the balance of the resulting magnetic force and the torque by controlling the quantity and direction of the current flowing through the coil (7).
公开/授权文献
- EP0686863B1 PLANAR GALVANOMIRROR AND PRODUCTION METHOD THEREFOR 公开/授权日:2003-03-12
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