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    PLANAR TYPE GALVANOMIRROR HAVING A DISPLACEMENT DETECTING FUNCTION AND METHOD FOR PRODUCING THE SAME
    4.
    发明公开
    PLANAR TYPE GALVANOMIRROR HAVING A DISPLACEMENT DETECTING FUNCTION AND METHOD FOR PRODUCING THE SAME 失效
    PLANARER GALVANOSPIEGEL MIT VERSCHIEBUNGSDETEKTOR

    公开(公告)号：EP0692729A1

    公开(公告)日：1996-01-17

    申请号：EP95906502.0

    申请日：1995-01-23

    申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

    发明人： ESASHI, Masayoshi ,  ASADA, Norihiro Yono Office, Nippon Signal Co. Ltd

    IPC分类号： G02B26/10

    CPC分类号： G02B26/0841 ,  G02B26/0816 ,  G02B26/105

    摘要： The present invention relates to a small-sized thin galvanomirror for detecting the displacement angle of a mirror, which is produced by a semiconductor process. By using a semiconductor process, a movable plate (5) and a torsion bar (6) for supporting this movable plate (5) are integrally formed on a silicon substrate (2), and a planar coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Permanent magnets (10A, 10B) and (11A, 11B) for generating magnetic fields are fixedly disposed on the planar coil (7) to thereby control the amount and direction of current to be conducted to the planar coil (7) so as to variably control the swinging angle of the movable plate (5) through the balance between a magnetic force generated and a torsional force by the torsion bar (6). Furthermore, detecting coils (12A, 12B) are provided below the movable plate (5) to thereby cause a detection current to flow to the planar coil (7) by superposing it on a driving current, whereby the detection of a displacement angle of the mirror is performed through the relative inductance variation between the planar coil (7) and the detection coils (12A, 12B) based on this detection current.

    摘要翻译： 本发明涉及一种用于检测通过半导体工艺制造的反射镜的位移角的小型薄电流镜。 通过使用半导体工艺，在硅基板（2）上一体地形成用于支撑该可动板（5）的可动板（5）和扭杆（6），并且平面线圈（7）和全反射镜 （8）形成在可动板（5）的上表面上。 用于产生磁场的永磁体（10A，10B）和（11A，11B）固定地设置在平面线圈（7）上，从而可变地控制要传导到平面线圈（7）的电流量和方向 通过扭杆（6）产生的磁力和扭转力之间的平衡来控制可动板（5）的摆动角度。 此外，检测线圈（12A，12B）设置在可动板（5）的下方，从而通过将驱动电流叠加在平面线圈（7）上而使检测电流流过平面线圈（7） 基于该检测电流，通过平面线圈（7）和检测线圈（12A，12B）之间的相对电感变化来执行反射镜。

    PLANAR GALVANOMIRROR AND PRODUCTION METHOD THEREFOR
    5.
    发明公开
    PLANAR GALVANOMIRROR AND PRODUCTION METHOD THEREFOR 失效
    平面设计师GALVANOSPIEGEL UND DESSEN HERSTELLUNGSVERFAHREN

    公开(公告)号：EP0686863A1

    公开(公告)日：1995-12-13

    申请号：EP95902924.0

    申请日：1994-12-08

    申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

    发明人： ESASHI, Masayoshi ,  ASADA, Norihiro, Yono Office The Nippon

    IPC分类号： G02B26/10

    CPC分类号： G02B26/085 ,  G02B26/0816 ,  G02B26/105 ,  Y10S359/90

    摘要： This invention relates to a thin and compact galvanomirror produced by using semiconductor fabrication technology. A flat movable plate (5) and a torsion bar (6) for rotatably supporting this movable plate (5) are integrally formed on a silicon substrate (2) by using semiconductor fabrication technology, and a flat coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Further, glass substrates (3), (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and permanent magnets (10A, 10B and 11A, 11B) for causing magnetic fields to act on the coil (7) are fixed at predetermined positions of these glass substrates. The rocking angle of the movable plate (5) is varied depending on the balance of the resulting magnetic force and the torque by controlling the quantity and direction of the current flowing through the coil (7).

    摘要翻译： 本发明涉及通过使用半导体制造技术制造的薄而紧凑的电镜。 通过使用半导体制造技术，在硅基板（2）上一体地形成用于可旋转地支撑该可动板（5）的平面可动板（5）和扭杆（6），并且平面线圈（7）和全反射 反射镜（8）形成在可动板（5）的上表面上。 此外，玻璃基板（3），（4）设置在硅基板（2）的上表面和下表面上，并且使磁场作用在线圈（7）上的永久磁铁（10A，10B和11A，11B） ）固定在这些玻璃基板的预定位置。 通过控制流过线圈（7）的电流的数量和方向，可动板（5）的摇摆角度根据所得磁力的平衡和扭矩而变化。

    PLANAR SOLENOID RELAY AND PRODUCTION METHOD THEREOF
    6.
    发明公开
    PLANAR SOLENOID RELAY AND PRODUCTION METHOD THEREOF 失效
    FLACHES TAUCHANKERRELAIS UND VERFAHREN ZU SEINER HERSTELLUNG。

    公开(公告)号：EP0685864A1

    公开(公告)日：1995-12-06

    申请号：EP95902925.7

    申请日：1994-12-08

    申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

    发明人： ESASHI, Masayoshi ,  ASADA, Norihiro, Yono Office The Nippon

    IPC分类号： H01H51/26

    CPC分类号： H01H50/005 ,  H01H1/20 ,  H01H2050/007 ,  H01H2050/025 ,  H01H2059/0054

    摘要： This invention relates to a thin and compact solenoid relay produced by employing semiconductor production technique. A flat sheet-like movable plate (5) and a torsion bar (6) for pivotally supporting the movable plate (5) are integrally formed on a silicon substrate (2) by employing semiconductor production technique. A flat surface coil (7) is disposed on the upper surface of the movable plate (5) ad a movable contact (9), on the lower surface side. Further, glass substrates (3) and (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and a fixed contact (11) capable of coming into contact with the movable contact (9) is disposed on the lower glass substrate (4). Permanent magnets (13A, 13B and 14A, 14B for causing a magnetic field to act ont the flat surface coil are fixedly disposed on the glass substrates (3) and (4). Power is fed to the flat surface coil (7) to generate the magnetic force so as to rotate the movable plate (5) against torsion of the torsion bar (6) and to bring the movable contact (9) and the fixed contact (11) into contact with, or out of contact from, each other.

    摘要翻译： 本发明涉及采用半导体生产技术制造的薄型紧凑型电磁继电器。 通过采用半导体制造技术，在硅基板（2）上一体地形成用于枢转地支撑可动板（5）的平板状可动板（5）和扭杆（6）。 平面表面线圈（7）设置在可动板（5）的上表面和可动触头（9）的下表面侧。 此外，玻璃基板（3）和（4）设置在硅基板（2）的上表面和下表面上，并且能够与可动触头（9）接触的固定触头（11）设置在 下玻璃基板（4）。 在玻璃基板（3）和（4）上固定设置用于使平坦面线圈上的磁场作用的永磁体（13A，13B，14A，14B），向平面线圈（7）供电，产生 磁力使得可动板（5）抵抗扭杆（6）的扭转而旋转，并使可动触头（9）和固定触头（11）彼此接触或脱离接触 。

    VIBRATING TYPE PRESSURE SENSOR
    8.
    发明授权
    VIBRATING TYPE PRESSURE SENSOR 有权
    振动型压力传感器

    公开(公告)号：EP1471340B1

    公开(公告)日：2008-09-24

    申请号：EP03701810.8

    申请日：2003-01-20

    申请人： Fujikin Incorporated ,  ESASHI, Masayoshi

    发明人： ESASHI, Masayoshi ,  HIRATA, Kaoru, c/o Fujikin Incorporated

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0017

    摘要： A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.

    ACTIVE TUBE AND ACTIVE TUBE SYSTEM
    9.
    发明公开
    ACTIVE TUBE AND ACTIVE TUBE SYSTEM 审中-公开
    联合国儿童基金会

    公开(公告)号：EP1695655A1

    公开(公告)日：2006-08-30

    申请号：EP04807213.6

    申请日：2004-12-10

    申请人： Japan Science and Technology Agency ,  ESASHI, Masayoshi ,  HAGA, Yoichi

    发明人： ESASHI, Masayoshi ,  HAGA, Yoichi ,  MIZUSHIMA, Masanori ,  MATSUNAGA, Tadao

    IPC分类号： A61B1/00 ,  A61M25/00 ,  G02B23/24

    CPC分类号： A61B1/0058 ,  A61B1/0051 ,  G02B23/2476

    摘要： An active tube and its system are offered which can be directed by bending its tip, controlling the degree of bend, thereby easily capable of insertion into difficult positions, and which can be driven at low temperature at which it can be used for inspection and medical treatment.
    A bending mechanism (21) is constructed by wiring an SMA coil (21e) along an outer side of a working channel tube (21a). The bending mechanism (21) is inserted into an outer skin tube (25) with a plurality of built-in weights (22). A front tip (23) is attached to the front end side of the bending mechanism (21) as a tip (2) of an active tube (1). A main tube (4) is connected through the working channel tube (21a) at the tip (2). A wire (21g) is connected to the SMA coil (21e). Said wire (21g) is inserted to the behind end side (41) of the main tube (4) in a wiring channel (4B9 of the main tube, thereby makes it possible to drive the bending mechanism (21) from outside.

    摘要翻译： 提供一种主动管及其系统，其可以通过弯曲其尖端来引导，控制弯曲度，从而容易地插入困难位置，并且可以在可用于检查和医疗的低温下被驱动 治疗。 弯曲机构（21）通过沿着工作通道管（21a）的外侧布线SMA线圈（21e）而构成。 弯曲机构（21）被插入具有多个内置重物（22）的外皮管（25）中。 前端（23）作为活动管（1）的前端（2）安装在弯曲机构（21）的前端侧。 主管（4）通过工作通道管（21a）在尖端（2）处连接。 线（21g）连接到SMA线圈（21e）。 所述线（21g）在布线通道（主管的4B9）中插入主管（4）的后端侧（41），从而可以从外部驱动弯曲机构（21）。