发明公开
EP0694778A4 METHOD OF EVALUATING SEGREGATION AT SOLID-LIQUID INTERFACE AND SEGREGATION APPARATUS THEREFOR
失效
VERFAHREN ZUR AUSWERTUNG DER SEGREGATION AN FEST-FLÜSSIGGREUZFLÄCHENUND ANORDNUNGHIERFÜR
- 专利标题: METHOD OF EVALUATING SEGREGATION AT SOLID-LIQUID INTERFACE AND SEGREGATION APPARATUS THEREFOR
- 专利标题(中): VERFAHREN ZUR AUSWERTUNG DER SEGREGATION AN FEST-FLÜSSIGGREUZFLÄCHENUND ANORDNUNGHIERFÜR
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申请号: EP92910179申请日: 1992-05-13
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公开(公告)号: EP0694778A4公开(公告)日: 1994-03-04
- 发明人: OHMI TADAHIRO
- 申请人: OHMI TADAHIRO
- 专利权人: OHMI TADAHIRO
- 当前专利权人: OHMI TADAHIRO
- 优先权: JP15588191 1991-05-30
- 主分类号: G01N25/14
- IPC分类号: G01N25/14 ; G01N1/40 ; G01N13/02 ; G01N33/38 ; H01L21/304 ; H01L21/306 ; G01N13/00 ; G01N1/28
摘要:
A method and an apparatus for evaluating a segregation at a solid-liquid interface, capable of specifying and measuring quantitatively a segregation substance, that is, a substance which precipitates preferentially on a solid surface from a liquid or remains preferentially in the liquid (or elutes from the solid surface into the liquid), on the contrary. A reception table (2) having a shallow cup-like upper surface is disposed inside a container (1). After a predetermined inert gas is introduced into the container (1), a sample sheet (3) placed on the reception table (2) is downwardly curved by deformation means such as a vacuum suction mechanism. Thereafter, a predetermined solution is dropped onto the sample sheet (3) through a capillary (4) and the dropped solution is evaporated by a mercury lamp (7). After predetermined evaporation is completed, the sample sheet (3) is taken out from the container (1), and is analyzed by an appropriate one of measuring instruments attached to the apparatus. The instrument used depends on a segregation substance.
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