发明公开
EP0750990A3 Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head 失效
打印流体喷射头,一个基体的这样的打印头及其制造方法和制造方法

Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head
摘要:
A printing head is intended to achieve high reliability and a production method of the printing head is intended to achieve high yield at low cost. A liquid ejecting printing head employs a base body, in which an electrothermal transducer element, a driving functional element for driving the electrothermal transducer element, a wiring electrode connecting between the electrothermal transducer element and the driving functional element, an insulation layer provided on the wiring electrode are formed on a substrate (100). The electrothermal transducer element has a heat generating resistor (108) formed of a material selected from a group consisting TaN, HfB 2 , Poly-Si,Ta-Al, Ta-Ir, Au and Ag. A protective layer (106) above the heat generating body is formed of an insulative compound deposited to be low density to high density in order. The protective layer (106) is formed by depositing the insulative material in the electrothermal transducer element or the wiring electrode with elevating the temperature of the base body from low temperature to high temperature.
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