发明公开
- 专利标题: Crystal pulling apparatus
- 专利标题(中): Kristallziehvorrichtung
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申请号: EP96309330.7申请日: 1996-12-20
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公开(公告)号: EP0781870A2公开(公告)日: 1997-07-02
- 发明人: Ozaki, Atsushi , Urano, Masahiko , Harada, Isamu , Kakegawa, Tomohiro , Nakano, Hideki
- 申请人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 申请人地址: 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 专利权人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人地址: 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 代理机构: Cooper, John
- 优先权: JP351277/95 19951227
- 主分类号: C30B15/14
- IPC分类号: C30B15/14
摘要:
A crystal pulling apparatus is disclosed which employs the Czochralski method. The crystal pulling apparatus is operated while a heater for heating a material melt in a crucible is controlled by the main controller of a main system. When maintenance of a heating state is disabled for some reason, a relay of a signal changeover circuit is switched so as to maintain the heating state under control of the backup controller of a backup system, thereby maintaining the material melt in a molten state. Thus, even when it becomes impossible for the main system to heat the material melt within the crucible, the material melt can be prevented from becoming solidified.
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