发明公开
- 专利标题: FIELD EMISSION ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
- 专利标题(中): 一定的压力增加的工作相关场发射扫描电子显微镜下
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申请号: EP96927346.0申请日: 1996-08-08
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公开(公告)号: EP0786145A1公开(公告)日: 1997-07-30
- 发明人: KNOWLES, Ralph, W.
- 申请人: PHILIPS ELECTRONICS NORTH AMERICA CORPORATION
- 申请人地址: 100 East 42nd Street New York, N.Y. 10017-5699 US
- 专利权人: PHILIPS ELECTRONICS NORTH AMERICA CORPORATION
- 当前专利权人: PHILIPS ELECTRONICS NORTH AMERICA CORPORATION
- 当前专利权人地址: 100 East 42nd Street New York, N.Y. 10017-5699 US
- 代理机构: Bakker, Hendrik, et al
- 优先权: USA2224 19950811
- 国际公布: WO1997007525 19970227
- 主分类号: H01J37
- IPC分类号: H01J37
摘要:
An environmental scanning electron microscope with field emission gun providing a spatial resolution of 2 nm which is comparable to the resolution of high vacuum field emission scanning microscope even though the specimen (66) is contained in the gaseous environment of the specimen chamber (68). The object lens assembly includes four differentially pumped vacuum zones (80, 82, 84, 86) to provide a pressure difference of up to approximately 10 Torr between the field emission gun and the specimen. The differentially pumped aperture system further includes at least four pressure limiting apertures (70, 72, 74, 76) defining the differentially pumped vacuum zones. One of the pressure limiting apertures is formed of a pressure limiting aperture assembly (103) which includes a plurality of stacked annular apertures (108, 110, 112, 114). Further, an electron detection assembly is provided for detecting signals from the surface of the specimen. The electron detection assembly includes a printed circuit board (132) having a signal ring electrode (136) biased to collect secondary electrons from the surface of said specimen and a final pressure limiting aperture (144) integrally formed therewith which extends through said signal ring electrode.
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