发明公开
- 专利标题: Magnetically levitated vibration damping apparatus
- 专利标题(中): 磁悬浮减振装置
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申请号: EP96112788申请日: 1996-08-08
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公开(公告)号: EP0789160A3公开(公告)日: 1998-07-08
- 发明人: WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
- 申请人: EBARA CORP , KAJIMA CORP
- 专利权人: EBARA CORP,KAJIMA CORP
- 当前专利权人: EBARA CORP,KAJIMA CORP
- 优先权: JP22707895 1995-08-11
- 主分类号: F16F15/02
- IPC分类号: F16F15/02 ; F16F15/03 ; F16F15/00
摘要:
A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).
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