发明公开
EP0791385A1 Method for reusing water soluble slurry waste fluid
失效
Verfahren zur Wiederverwendung vonwasserlöslichemSchlammabwasser
- 专利标题： Method for reusing water soluble slurry waste fluid
- 专利标题（中）： Verfahren zur Wiederverwendung vonwasserlöslichemSchlammabwasser
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申请号： EP97102600.0申请日： 1997-02-18
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公开(公告)号： EP0791385A1公开(公告)日： 1997-08-27
- 发明人: Toyama, Kohei , Kiuchi, Etsuo , Hayakawa, Kazuo , Kaburagi, Shingo , Ashida, Akio , Ito, Takara , Noami, Kuniaki
- 申请人： SHIN-ETSU HANDOTAI COMPANY LIMITED , Mimasu Semiconductor Industry Company Limited , Ohtomo Chemical Ind. Corp. , Hitachi Zosen Metal Works Co., Ltd
- 申请人地址： 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 专利权人： SHIN-ETSU HANDOTAI COMPANY LIMITED,Mimasu Semiconductor Industry Company Limited,Ohtomo Chemical Ind. Corp.,Hitachi Zosen Metal Works Co., Ltd
- 当前专利权人： SHIN-ETSU HANDOTAI COMPANY LIMITED,Mimasu Semiconductor Industry Company Limited,Ohtomo Chemical Ind. Corp.,Hitachi Zosen Metal Works Co., Ltd
- 当前专利权人地址： 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 代理机构： Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权： JP33567/96 19960221
- 主分类号： B01D21/01
- IPC分类号： B01D21/01
摘要：
A system for reusing water soluble slurry waste fluid wherein separated available abrasive grains and extracted water soluble coolant are reused. This system is capable of reducing a disposal cost due to a reduction of a load to a waste water disposal plant by effectively reusing water soluble slurry waste fluid, and making a contribution to a reduction of a total slicing cost by reusing abrasive grains and water soluble coolant.
公开/授权文献
- EP0791385B1 Method for reusing water soluble slurry waste fluid 公开/授权日：1998-11-04
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