发明公开
- 专利标题： ANGULAR VELOCITY SENSOR
- 专利标题（中）： 角速度传感器
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申请号： EP96929545.0申请日： 1996-09-06
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公开(公告)号： EP0791804A1公开(公告)日： 1997-08-27
- 发明人: TERADA, Jiro , SENDA, Hiroshi , TAMURA, Masami , USHIHARA, Masaharu , HATANAKA, Masakazu , MURAKAMI, Masayoshi , SHIMIZU, Hideyuki
- 申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD
- 申请人地址： 1006-banchi, Oaza-Kadoma Kadoma-shi, Osaka 571 JP
- 专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD
- 当前专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD
- 当前专利权人地址： 1006-banchi, Oaza-Kadoma Kadoma-shi, Osaka 571 JP
- 代理机构： Kügele, Bernhard
- 优先权： JP230885/95 19950908; JP330002/95 19951219
- 国际公布： WO9709585 19970313
- 主分类号： G01C19/56
- IPC分类号： G01C19/56 ; G01P9/04
摘要：
The present invention is related to an angular velocity sensor, and intends to improve the detection characteristic through a precise measuring of an angular velocity signal.
For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwitching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancell to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.
For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwitching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancell to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.
公开/授权文献
- EP0791804B1 ANGULAR VELOCITY SENSOR 公开/授权日：2004-11-24
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