公开(公告)号：EP0791804A1

公开(公告)日：1997-08-27

申请号：EP96929545.0

申请日：1996-09-06

申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD

发明人： TERADA, Jiro ,  SENDA, Hiroshi ,  TAMURA, Masami ,  USHIHARA, Masaharu ,  HATANAKA, Masakazu ,  MURAKAMI, Masayoshi ,  SHIMIZU, Hideyuki

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： The present invention is related to an angular velocity sensor, and intends to improve the detection characteristic through a precise measuring of an angular velocity signal.
For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwitching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancell to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.

摘要翻译： 本发明涉及角速度传感器，并且旨在通过精确测量角速度信号来改善检测特性。 为此目的，本发明的角速度传感器包括U形第一和第二压电元件（4），（5），将检测电极（6）夹在中间，其中在音叉臂（4a），（ 5a）第一和第二压电元件（4），（5）沿压电元件接合在一起的厚度方向极化。 在音叉臂上以对角线排列设置的驱动电极（7），（12）和（8），（11）被提供有彼此反相的驱动信号。 在这样的结构中，驱动信号在检测电极附近彼此细胞化; 结果，驱动信号决不会与由检测电极（6）检测到的检测信号混合。 因此，检测角速度信号的能力得到改善。

公开(公告)号：EP0791804B1

公开(公告)日：2004-11-24

申请号：EP96929545.0

申请日：1996-09-06

申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD

发明人： TERADA, Jiro ,  SENDA, Hiroshi ,  TAMURA, Masami ,  USHIHARA, Masaharu ,  HATANAKA, Masakazu ,  MURAKAMI, Masayoshi ,  SHIMIZU, Hideyuki

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： An angular velocity sensor for accurately detecting an angular velocity signal. The angular velocity sensor employs a tuning fork structure wherein first and second U-shaped piezoelectric members (4) and (5) superposed with each other through a detection electrode (6) are polarized in the same direction as the direction of thickness in which their prongs (4a) and (5a) at least on one sidre is superposed, and driving signals having opposite phases are supplied between driving electrodes (7) and (12) and between (8) and (11) disposed on the diagonal lines of the tuning fork prongs. Therefore, the driving signals are cancelled in the proximity of the detection electrode, and the driving signals do not mix in the signal detected by the detection electrode (6). Accordingly, the performance of the angular velocity signal can be improved.

摘要翻译： 用于精确检测角速度信号的角速度传感器。 角速度传感器采用音叉结构，其中通过检测电极（6）彼此重叠的第一和第二U形压电构件（4）和（5）沿与其中它们的厚度方向相同的方向极化 （7）和（12）之间以及（8）和（11）之间提供具有相反相位的驱动信号，该驱动信号至少在一个栅极上重叠， 音叉尖头。 因此，驱动信号在检测电极附近被消除，并且驱动信号不混合由检测电极（6）检测到的信号。 相应地，可以改善角速度信号的性能。