发明公开
- 专利标题: VAPORIZER AND LIQUID DELIVERY SYSTEM USING SAME
- 专利标题(中): 蒸发器和供液系统及其用途下
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申请号: EP96904630申请日: 1996-02-13
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公开(公告)号: EP0810898A4公开(公告)日: 1998-12-23
- 发明人: EWING JAMES H
- 申请人: MKS INSTR INC
- 专利权人: MKS INSTR INC
- 当前专利权人: MKS INSTR INC
- 优先权: US39372395 1995-02-24
- 主分类号: B01D1/00
- IPC分类号: B01D1/00 ; B01D1/22 ; B01D3/34 ; B01J4/00 ; B01J7/02 ; F24J3/00 ; B01B1/00 ; B01D3/06 ; B01D7/00 ; F22B27/00 ; F22B29/06 ; F24B1/28 ; F24F3/14 ; F24F6/08
摘要:
A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.
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