公开(公告)号：EP0810898A4

公开(公告)日：1998-12-23

申请号：EP96904630

申请日：1996-02-13

申请人： MKS INSTR INC

发明人： EWING JAMES H

IPC分类号： B01D1/00 ,  B01D1/22 ,  B01D3/34 ,  B01J4/00 ,  B01J7/02 ,  F24J3/00 ,  B01B1/00 ,  B01D3/06 ,  B01D7/00 ,  F22B27/00 ,  F22B29/06 ,  F24B1/28 ,  F24F3/14 ,  F24F6/08

CPC分类号： B01D1/221 ,  B01D1/0011 ,  B01D3/346 ,  F24J3/00

摘要： A liquid vaporizer includes a stack of coaxially aligned, thermally conductive, thin, flat disks having different diameters. The larger diameter disks each include at least one aperture and preferably a plurality of closely spaced apertures radially located a predetermined distance from the center of the disk. The vaporizer further includes means for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures of the larger diameter disks over the liquid film on the portion of the surfaces of the larger diameter disks.