发明公开
EP0844502A1 Component alignment methods and systems
失效
Verfahren zur Komponentenausrichtung und Systeme
- 专利标题: Component alignment methods and systems
- 专利标题(中): Verfahren zur Komponentenausrichtung und Systeme
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申请号: EP97307920.5申请日: 1997-10-07
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公开(公告)号: EP0844502A1公开(公告)日: 1998-05-27
- 发明人: Marcuse, Dietrich , Presby, Herman Melvin
- 申请人: LUCENT TECHNOLOGIES INC.
- 申请人地址: 600 Mountain Avenue Murray Hill, New Jersey 07974-0636 US
- 专利权人: LUCENT TECHNOLOGIES INC.
- 当前专利权人: LUCENT TECHNOLOGIES INC.
- 当前专利权人地址: 600 Mountain Avenue Murray Hill, New Jersey 07974-0636 US
- 代理机构: Johnston, Kenneth Graham
- 优先权: US755668 19961125
- 主分类号: G02B6/255
- IPC分类号: G02B6/255 ; G02B6/30 ; G02B6/42 ; G01B11/00
摘要:
Measuring and setting techniques for relative component (50 and 55) orientations and separations is accomplished by projecting a coherent light beam into one end of a gap (60) formed between facing surfaces (52,57) of adjacent components. This light beam projection causes a corresponding light ray pattern to be projected out of an opposite end of the gap. The arrangement of light rays in the resulting pattern (30) is indicative of the relative positions of, and distance between, the facing surfaces. Such a projected pattern is used for determining the relative positions between adjacent components, alone, or as feedback for adjusting such component positions to achieve a desired orientation and/or separation distance between the components.
The light ray pattern (30) projected on the detector (10) is produced by one or a combination of (1) reflection of the light beam (25) from the respective surfaces (52) and (57), (2) portions of the light beam (25) that travel trough the gap unhindered, i.e., not reflected by the facing surfaces (52 and 57), and (3) light diffraction. Typically, the projected pattern (30) includes at least one primary region of light intensity caused by reflection and/or unhindered portions of the light beam (25) superimposed over secondary regions of varying light intensities caused by diffraction of the light beam (25).
The light ray pattern (30) projected on the detector (10) is produced by one or a combination of (1) reflection of the light beam (25) from the respective surfaces (52) and (57), (2) portions of the light beam (25) that travel trough the gap unhindered, i.e., not reflected by the facing surfaces (52 and 57), and (3) light diffraction. Typically, the projected pattern (30) includes at least one primary region of light intensity caused by reflection and/or unhindered portions of the light beam (25) superimposed over secondary regions of varying light intensities caused by diffraction of the light beam (25).
公开/授权文献
- EP0844502B1 Component alignment methods and systems 公开/授权日:2000-03-01
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