发明公开
- 专利标题： Manufacturing semiconductor devices
- 专利标题（中）： Herstellung von Halbleiteranordnungen
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申请号： EP97308883.4申请日： 1997-11-05
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公开(公告)号： EP0847076A2公开(公告)日： 1998-06-10
- 发明人: Beardmore, Geoffrey
- 申请人： Smiths Industries Public Limited Company
- 申请人地址： 765, Finchley Road London, NW11 8DS GB
- 专利权人： Smiths Industries Public Limited Company
- 当前专利权人： Smiths Industries Public Limited Company
- 当前专利权人地址： 765, Finchley Road London, NW11 8DS GB
- 代理机构： Flint, Jonathan McNeill
- 优先权： GB9625186 19961204
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A very compact silicon fabrication line has a number of process cells 20 to 25 all contained within a common outer enclosure 1. A semiconductor wafer 70 is loaded into the enclosure 1 through an air lock 10 and is mounted on a cap 56 supported under a carriage 80 movable along a rail 90 extending along the enclosure 1 between the different process cells 20 to 25. The cap 56 is lowered into sealing engagement with the open top 53, 54 of a cell 20 to 25 during each process.
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