发明公开
EP0858100A1 Constant-temperature liquid-circulating apparatus
失效
Konstanttemperatur的Flüssigkeitszirkulationseinrichtung
- 专利标题： Constant-temperature liquid-circulating apparatus
- 专利标题（中）： Konstanttemperatur的Flüssigkeitszirkulationseinrichtung
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申请号： EP98300742.8申请日： 1998-02-02
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公开(公告)号： EP0858100A1公开(公告)日： 1998-08-12
- 发明人: Watanabe, Mitsuhiro
- 申请人： SMC CORPORATION
- 申请人地址： 16-4, Shinbashi 1-chome Minato-ku Tokyo 105 JP
- 专利权人： SMC CORPORATION
- 当前专利权人： SMC CORPORATION
- 当前专利权人地址： 16-4, Shinbashi 1-chome Minato-ku Tokyo 105 JP
- 代理机构： Findlay, Alice Rosemary
- 优先权： JP40086/97 19970207
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A cylindrical casing 33 is provided in a tank 25 in which a pump 14 and a heat exchanger 15 are assembled. A heater 12 is mounted at the top of the tank 25 in such a way that its heating section 12a is inserted into the casing 33. A constant-temperature liquid is fed from an inlet 36 at the lower end of the casing 33, fills the inside of the casing 33, and then flows out from the outlet 37 at the upper end, while it is simultaneously heated by the heater 12.
公开/授权文献
- EP0858100B1 Constant-temperature liquid-circulating apparatus 公开/授权日：2004-04-28
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