发明公开
- 专利标题: Polishing apparatus
- 专利标题(中): 抛光装置
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申请号: EP98106067.6申请日: 1998-04-02
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公开(公告)号: EP0868975A1公开(公告)日: 1998-10-07
- 发明人: Numoto, Minoru , Inaba, Takao , Sakai, Kenji , Terashita, Hisashi , Satoh, Manabu
- 申请人: TOKYO SEIMITSU CO.,LTD.
- 申请人地址: 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo JP
- 专利权人: TOKYO SEIMITSU CO.,LTD.
- 当前专利权人: TOKYO SEIMITSU CO.,LTD.
- 当前专利权人地址: 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo JP
- 代理机构: Hering, Hartmut, Dipl.-Ing.
- 优先权: JP86814/97 19970404; JP138925/97 19970528
- 主分类号: B24B37/04
- IPC分类号: B24B37/04
摘要:
The polishing apparatus (100) comprises a turn table (10), which polishes a semiconductor wafer (2), and a holding and pressing part (20), which holds and presses the semiconductor wafer (2) against a polishing surface (12a) of the turn table (10). The holding and pressing part (20) transmits a force from an air bag (62) to the semiconductor wafer (2) via a pressurized fluid layer (L) to thereby press the semiconductor wafer (2) against the polishing surface (12a) via the pressurized fluid layer (L), so that the semiconductor wafer (2) can be polished. Thereby, it is possible to uniformly polish the semiconductor wafer (2).
公开/授权文献
- EP0868975B1 Polishing apparatus 公开/授权日:2004-10-20
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