发明公开
- 专利标题: INTEGRATED G (D)E-E DETECTOR TELESCOPE
- 专利标题(中): 集成了去-E探测器望远镜
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申请号: EP97916687.0申请日: 1997-03-20
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公开(公告)号: EP0896738A1公开(公告)日: 1999-02-17
- 发明人: Pettersson, Sture , Thungström, Göran , Whitlow, Harry
- 申请人: Pettersson, Sture , Thungström, Göran , Whitlow, Harry
- 申请人地址: Sandmovägen 5B 756 47 Uppsala SE
- 专利权人: Pettersson, Sture,Thungström, Göran,Whitlow, Harry
- 当前专利权人: Pettersson, Sture,Thungström, Göran,Whitlow, Harry
- 当前专利权人地址: Sandmovägen 5B 756 47 Uppsala SE
- 代理机构: Svanfeldt, Hans-Ake
- 优先权: SE19960001235 19960329
- 国际公布: WO1997037389 19971009
- 主分类号: H01L25
- IPC分类号: H01L25 ; H01L31
摘要:
A device forming a high energy resolution integrated semiconductor ΔE-E detector telescope is disclosed, in which is formed a very thin ΔE detector portion (14) primarily fabricated from a first semiconductor wafer which is bonded/silicidized to a second semiconductor wafer forming an E detector portion (18). This ΔE-E detector provides a well supported very thin ΔE detector for high resolution. The very thin ΔE detector portion bonded/silicidized to the E detector portion further provides between each other a buried metallic layer (16) acting as a contact common to the two detectors, which metal layer is thin and presents a low resistivity.
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