发明授权
- 专利标题: INTERFERENZFILTER AUF DER BASIS VON PORÖSEM SILICIUM
- 专利标题(英): Interference filter based on porous silicon
- 专利标题(中): 干扰滤波器实现多孔硅
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申请号: EP97925897.7申请日: 1997-05-30
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公开(公告)号: EP0902909B1公开(公告)日: 2002-10-02
- 发明人: BERGER, Michael , THÖNISSEN, Markus , KRÜGER, Michael , ARENS-FISCHER, Rüdiger , LÜTH, Hans
- 申请人: Forschungszentrum Jülich GmbH
- 申请人地址: 52425 Jülich DE
- 专利权人: Forschungszentrum Jülich GmbH
- 当前专利权人: Forschungszentrum Jülich GmbH
- 当前专利权人地址: 52425 Jülich DE
- 优先权: DE19622748 19960605
- 国际公布: WO97046908 19971211
- 主分类号: G02F1/21
- IPC分类号: G02F1/21 ; G02F1/1333
摘要:
The invention relates to a component with at least one layer or a layer system consisting of porous material, in particular silicon or silicon oxide. At least one section of the pores or all pores of the porous material are filled with a substance, the index of refraction thereof being alterable by an external influence. The index of refraction of the substance can advantageously be changed or adjusted by a voltage or an electric current.
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