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公开(公告)号：EP0827631B1
公开(公告)日：2002-07-24
申请号：EP96919582.5
申请日：1996-05-20
发明人： BERGER, Michael , THÖNISSEN, Markus , GRÄBER, Jürgen , KRÜGER, Michael , MARSO, Michel , MÜNDER, Herbert , GLÜCK, Olaf , ARENS-FISCHER, Rüdiger , LÜTH, Hans
IPC分类号： H01L21/306
CPC分类号： H01L21/306 , C25F3/14 , G02B6/122 , G02B6/136 , G02B2006/12173 , G02B2006/12176
摘要： The invention relates to a process for producing a structure with porous silicon in which the silicon is rendered porous at the surface of a silicon substrate (1) by means of an etching solution (4). A non-insulating layer (3) is applied to regions of the substrate surface not to be rendered porous and an electric voltage (UM) is applied between it and the substrate during the porosity producing process. The voltage (UM) can preferably be applied at intervals in time and/or at separate points to form regions of differing porosity.
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2.发明授权
公开(公告)号：EP0946890B1
公开(公告)日：2002-05-29
申请号：EP97954706.4
申请日：1997-12-20
发明人： BERGER, Michael , KRÜGER, Michael , THÖNISSEN, Markus , ARENS-FISCHER, Rüdiger , LÜTH, Hans , LANG, Walter , THEISS, Wolfgang , HILBRICH, Stefan
IPC分类号： G02B5/20
CPC分类号： H01L21/30604 , C25F3/12 , G02B5/285
摘要： The invention relates to a layer with an area made of a porous material extending from the surface of the layer to the inside of the latter, wherein the dimension of the porous layer area in the direction perpendicular to the surface of the layer exhibits different values. The invention also relates to a method for producing a layer with a porous area or a layer system, wherein said porous layer area is formed by etching and means are used to choose a physical dimension in correlation with the etching speed of the etching process in order to form at least one etching gradient.
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3.发明授权MESSVERFAHREN UNTER EINSATZ MINDESTENS EINER BIOLOGISCHEN REZEPTORZELLE SOWIE EINE ZUR DURCHFÜHRUNG DES MESSVERFAHRENS GEEIGNETE VORRICHTUNG 有权测量方法使用至少一个生物受体细胞以及实施测量器件非常适合的一种方法
公开(公告)号：EP1255982B1
公开(公告)日：2005-11-09
申请号：EP00989805.7
申请日：2000-11-28
发明人： SCHÖNING, Michael, J. , LÜTH, Hans , KAUPP, Ulrich, B. , SCHÜTZ, Stefan , SCHROTH, Peter , THUST, Marion
IPC分类号： G01N27/414
CPC分类号： G01N33/5005 , G01N33/0031
摘要： The reactions of single cells to particular substances in their environment can be established by means of signal converters. In a manner known per se, the potential difference between the interior and the exterior of a cell is measured by means of electrodes, whereby the cell is, however, damaged at least in certain places. Conventional methods which permit a recording of a cell reaction without intervening in the cell interior are either complex or limited in response. In a measuring technique, using at least one biological receptor cell, an asymmetric, extra-cellular, electrical potential of the at least one receptor cell is formed, which produces a multi-pole field and said multi-pole field is applied to determining the cell reaction. The asymmetry in the extra-cellular electrical potential of the at least one receptor cell which reacts to environmental changes can be achieved by, for example, embedding the at least one receptor cell in a bedding element which corresponds to the geometrical form thereof.
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4.发明公开
公开(公告)号：EP1337842A2
公开(公告)日：2003-08-27
申请号：EP01988860.1
申请日：2001-10-23
发明人： SCHÖNING, Michael, Josef , POGHOSSIAN, Arshak , LÜTH, Hans , YOSHINOBU, Tatsuo , IWASAKI, Hiroshi
IPC分类号： G01N27/30
CPC分类号： G01N27/002
摘要： The invention relates to a measuring device for one-dimensional or multidimensional detection of chemical or biological components (analytes). A photosensitive contact is applied to a semiconductor structure and the modification of the potential barrier of the contact upon illumination is used as a functional principle, thereby avoiding all stated disadvantages of prior art, while at the same time guaranteeing two-dimensional local resolution of the analyte substance to be detected by means of a sensor.
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公开(公告)号：EP0902909B1
公开(公告)日：2002-10-02
申请号：EP97925897.7
申请日：1997-05-30
IPC分类号： G02F1/21 , G02F1/1333
CPC分类号： G02F1/21 , G02F1/1334
摘要： The invention relates to a component with at least one layer or a layer system consisting of porous material, in particular silicon or silicon oxide. At least one section of the pores or all pores of the porous material are filled with a substance, the index of refraction thereof being alterable by an external influence. The index of refraction of the substance can advantageously be changed or adjusted by a voltage or an electric current.
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6.发明公开
公开(公告)号：EP0946890A2
公开(公告)日：1999-10-06
申请号：EP97954706.0
申请日：1997-12-20
发明人： BERGER, Michael , KRÜGER, Michael , THÖNISSEN, Markus , ARENS-FISCHER, Rüdiger , LÜTH, Hans , LANG, Walter , THEISS, Wolfgang , HILBRICH, Stefan
CPC分类号： H01L21/30604 , C25F3/12 , G02B5/285
摘要： The invention relates to a layer with an area made of a porous material extending from the surface of the layer to the inside of the latter, wherein the dimension of the porous layer area in the direction perpendicular to the surface of the layer exhibits different values. The invention also relates to a method for producing a layer with a porous area or a layer system, wherein said porous layer area is formed by etching and means are used to choose a physical dimension in correlation with the etching speed of the etching process in order to form at least one etching gradient.
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7.发明公开BIOSENSORSYSTEM ZUR MESSUNG VON DURCH SCHWELBRÄNDE VERURSACHTEN, ORGANISCHEN SPURENKOMPONENTEN 失效生物传感器，用于测量阴燃引起的，有机TRACK组件
公开(公告)号：EP0852779A2
公开(公告)日：1998-07-15
申请号：EP96945135.0
申请日：1996-09-18
发明人： SCHÖNING, Michael, Josef , SCHÜTZ, Stefan , WEISSBECKER, Bernhard , SCHWARZ, Axel , KOHL, Claus-Dieter , HUMMEL, Hans, E. , KORDOS, Peter , LÜTH, Hans
CPC分类号： G01N33/54373
摘要： The invention pertains to a biosensor with a chemoreceptor for detecting one or more trace components produced by burning. The chemoreceptor is preferably connected to a semiconductor component via an electrolyte. The biosensor can be designed in such a way that only a small number of insect antenna segments, in particular a single such segment, is connected at one end of the chemoreceptor directly or via the electrolyte to the semiconductor component.
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8.发明公开VERFAHREN ZUR STRUKTURIERUNG PORÖSEN SILICIUMS, SOWIE EINE PORÖSES SILICIUM ENTHALTENDE STRUKTUR 失效METHOD FOR结构化的多孔硅和多孔含硅结构
公开(公告)号：EP0827631A1
公开(公告)日：1998-03-11
申请号：EP96919582.0
申请日：1996-05-20
发明人： BERGER, Michael , THÖNISSEN, Markus , GRÄBER, Jürgen , KRÜGER, Michael , MARSO, Michel , MÜNDER, Herbert , GLÜCK, Olaf , ARENS-FISCHER, Rüdiger , LÜTH, Hans
CPC分类号： H01L21/306 , C25F3/14 , G02B6/122 , G02B6/136 , G02B2006/12173 , G02B2006/12176
摘要： The invention relates to a process for producing a structure with porous silicon in which the silicon is rendered porous at the surface of a silicon substrate (1) by means of an etching solution (4). A non-insulating layer (3) is applied to regions of the substrate surface not to be rendered porous and an electric voltage (UM) is applied between it and the substrate during the porosity producing process. The voltage (UM) can preferably be applied at intervals in time and/or at separate points to form regions of differing porosity.
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9.发明公开HERSTELLUNG DER CHALKOGENIDGLASSCHICHT EINER SCHWERMETALLELEKTRODE DURCH LASERABLATION 审中-公开制造硫系玻璃重金属铅通过激光烧蚀
公开(公告)号：EP1044367A1
公开(公告)日：2000-10-18
申请号：EP98963343.3
申请日：1998-11-06
发明人： SCHÖNING, Michael, Josef , ZANDER, Willi , SCHUBERT, Jürgen , LEGIN, Andrey,Research Institute of Chemistry , VLASOV, Yuri,Research Institute of Chemistry , KORDOS, Peter , LÜTH, Hans
CPC分类号： G01N27/36 , C23C14/0623
摘要： The present invention relates to a method for producing a layer of chalcogenide glass as well as to an electrode which contains said layer and is used for detecting heavy metals. In order to produce such an electrode which can be miniaturised according to the thin-film techniques, the layer is formed using an ablation laser.
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10.发明公开
公开(公告)号：EP1017990A2
公开(公告)日：2000-07-12
申请号：EP97922810.3
申请日：1997-02-28
IPC分类号： G01N21/00
CPC分类号： G01N21/41
摘要： In an analytic process using porous silicon, a substance is detected or its concentration in a fluid is determined, based on the change in optical properties of porous silicon as a function of the index of refraction of the substance or of the fluid containing the substance present in the pores of the porous silicon. An analytic device using porous silicon to detect a substance or determe the concentration of a substance in a fluid consists of a component which is at least partly made of porous silicon, the optical property of which is dependent on the index of refraction of the substance or of the fluid containing the substance, where a change in the optical property of porous silicon can be measured to indicate detection of the substance or to determine the concentration in the pores of the porous silicon.
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