发明公开
- 专利标题: Method of forming integrated optical circuit planar waveguide turning mirrors
- 专利标题(中): 形成集成光路平面波导转向镜的方法
-
申请号: EP98307240.6申请日: 1998-09-08
-
公开(公告)号: EP0903596A3公开(公告)日: 1999-06-02
- 发明人: Presby, Herman Melvin
- 申请人: LUCENT TECHNOLOGIES INC.
- 申请人地址: 600 Mountain Avenue Murray Hill, New Jersey 07974-0636 US
- 专利权人: LUCENT TECHNOLOGIES INC.
- 当前专利权人: LUCENT TECHNOLOGIES INC.
- 当前专利权人地址: 600 Mountain Avenue Murray Hill, New Jersey 07974-0636 US
- 代理机构: Johnston, Kenneth Graham
- 优先权: US932935 19970917
- 主分类号: G02B6/122
- IPC分类号: G02B6/122 ; G02B6/13
摘要:
Planar waveguide turning mirrors in integrated optical circuits (150) are formed using at least one light beam (140) including a wavelength in a particular wavelength range that is absorbed by the cladding layer (160) of the circuit to vaporize a particular region of the corresponding cladding layer at the desired angle to form the recessed light deflector surface of the turning mirror. In addition, it is also possible to form the cladding layer on a substrate comprising a material that enables light wavelengths in the particular wavelength range to be substantially transmitted through the substrate to advantageously enable greater flexibility in the light beam energy and/or the time the beam is incident on the cladding layer during the vaporization process.
公开/授权文献
信息查询