发明公开
EP0903596A3 Method of forming integrated optical circuit planar waveguide turning mirrors 有权
形成集成光路平面波导转向镜的方法

Method of forming integrated optical circuit planar waveguide turning mirrors
摘要:
Planar waveguide turning mirrors in integrated optical circuits (150) are formed using at least one light beam (140) including a wavelength in a particular wavelength range that is absorbed by the cladding layer (160) of the circuit to vaporize a particular region of the corresponding cladding layer at the desired angle to form the recessed light deflector surface of the turning mirror. In addition, it is also possible to form the cladding layer on a substrate comprising a material that enables light wavelengths in the particular wavelength range to be substantially transmitted through the substrate to advantageously enable greater flexibility in the light beam energy and/or the time the beam is incident on the cladding layer during the vaporization process.
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