发明授权
- 专利标题： SUCKED MATERIAL DETECTOR, SUCKED MATERIAL DETECTING METHOD USING THE SAME DETECTOR, SHIFT DETECTING METHOD USING THE SAME DETECTOR, AND CLEANING METHOD USING THE SAME DETECTOR
- 专利标题（中）： 吸入型物质探测器和方法，测定方法的错误和清洁过程的定向使用该探测器
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申请号： EP97924239.3申请日： 1997-05-28
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公开(公告)号： EP0907311B1公开(公告)日： 2003-12-03
- 发明人: FURUTA, Katsunobu
- 申请人： Advantest Corporation
- 申请人地址： 32-1, Asahicho 1-chome Nerima-ku, Tokyo 179 JP
- 专利权人： Advantest Corporation
- 当前专利权人： Advantest Corporation
- 当前专利权人地址： 32-1, Asahicho 1-chome Nerima-ku, Tokyo 179 JP
- 代理机构： Bérogin, Francis
- 优先权： JP13877896 19960531; JP13372497 19970523
- 国际公布： WO97046071 19971204
- 主分类号： H05K13/08
- IPC分类号： H05K13/08
摘要：
This detector is provided with a suction transfer arm (12) for vacuum sucking an object material (11) at a nozzle bore and transferring the material in the horizontal and vertical directions. On the rear side of the portion of a stage (13) on which the material (11) to be sucked is placed, an upwardly directed light-emitting sensor (14) is provided. The portion of the stage on which the material (11) to be sucked is placed is provided with a through hole by which the upward rays of light-emitting sensor (14) is not shut off. At an inner part of the nozzle bore of the suction transfer arm (12), a downwardly directed light receiving sensor (15) for receiving the rays of light from the light-emitting sensor (14) is provided.
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