公开(公告)号：EP0907311B1

公开(公告)日：2003-12-03

申请号：EP97924239.3

申请日：1997-05-28

申请人： Advantest Corporation

发明人： FURUTA, Katsunobu

IPC分类号： H05K13/08

CPC分类号： H05K13/02 ,  H05K13/0408 ,  H05K13/08

摘要： This detector is provided with a suction transfer arm (12) for vacuum sucking an object material (11) at a nozzle bore and transferring the material in the horizontal and vertical directions. On the rear side of the portion of a stage (13) on which the material (11) to be sucked is placed, an upwardly directed light-emitting sensor (14) is provided. The portion of the stage on which the material (11) to be sucked is placed is provided with a through hole by which the upward rays of light-emitting sensor (14) is not shut off. At an inner part of the nozzle bore of the suction transfer arm (12), a downwardly directed light receiving sensor (15) for receiving the rays of light from the light-emitting sensor (14) is provided.

公开(公告)号：EP0907311A1

公开(公告)日：1999-04-07

申请号：EP97924239.3

申请日：1997-05-28

申请人： Advantest Corporation

发明人： FURUTA, Katsunobu

IPC分类号： H05K13/08

CPC分类号： H05K13/02 ,  H05K13/0408 ,  H05K13/08

摘要： The present apparatus includes an attracting transport(12) arm for attracting an attraction object(11) via a nozzle hole by vacuum and transporting the attraction object in a horizontal or vertical direction. An upwardly directed light emitting sensor(14) is disposed on the rear side of a portion of a stage(13) at which the attraction object(11) is to be placed. At the location at which the attraction object(11) is to be placed, a through-hole which to prevent intercept upward rays of light of the light emitting element(14) is perforated. Meanwhile, a downwardly directed light receiving element(15) for receiving rays of light from the light emitting element(14) is disposed in the interior of the nozzle hole of the attracting transport arm(12).

摘要翻译： 本装置包括：在吸取传送（12），臂用于通过真空经由喷嘴孔吸引吸着物（11）和在水平或垂直方向上输送吸着物。 向上指向到发光传感器（14）被布置在一个阶段（13），在该吸着物（11）要被放置的部分的背面侧。 在在哪个吸着物（11）要被放置，一个通孔哪个，以防止发光元件的光的截距向上射线的位置（14）被穿孔。 同时，用于从所述发光元件（14）接收的光的光线方向向下的光接收元件（15）在所说吸取传送机械臂（12）的喷嘴孔内部设置。