发明公开
- 专利标题: Polycarbonate formulation and carrier for semiconductor wafers
- 专利标题(中): 聚碳酸酯化合物和晶片载体
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申请号: EP98309965.6申请日: 1998-12-04
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公开(公告)号: EP0924260A3公开(公告)日: 2001-10-24
- 发明人: Spilman, Gary Eugene , Skabardonis, John G. , Gohr, Eric Thomas , Lindway, Martin J. , Hamilton, Douglas George , Bradley, David A.
- 申请人: GENERAL ELECTRIC COMPANY
- 申请人地址: 1 River Road Schenectady, NY 12345 US
- 专利权人: GENERAL ELECTRIC COMPANY
- 当前专利权人: GENERAL ELECTRIC COMPANY
- 当前专利权人地址: 1 River Road Schenectady, NY 12345 US
- 代理机构: Szary, Anne Catherine, Dr.
- 优先权: US995483 19971222
- 主分类号: C08L69/00
- IPC分类号: C08L69/00 ; C08K5/00 ; C08K5/3492 ; H01L21/00
摘要:
An aromatic polycarbonate composition and articles made from same having less than 300 parts per billion each of ionic impurities, particularly Sulfate and Chloride ions prepared by devolatilizing the ionic impurites from a polycarbonate composition employing an aqueous medium of about 1% by weight based on the weight of the polycarbonate composition. Preferably the devolatilizing is carried out in an extruder during compounding the polycarbonate composition and preferably under a vacuum. Also, the extruded strands of polycarbonate resin are quenched in a water bath having a Sulfate and Chloride ion content of less then 300 ppb each.
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