发明公开
EP0964251A4 OPTICAL WAVEGUIDE PROBE AND ITS MANUFACTURING METHOD 有权
光纤探测器的制作工艺

OPTICAL WAVEGUIDE PROBE AND ITS MANUFACTURING METHOD
摘要:
An optical waveguide probe which is formed into a hook shape by a manufacturing method using a silicon process and which emits a light from its tip for detection, comprising an optical waveguide (1) which is formed into a hook shape, the probe needle part (5) of which is sharpened and which is made of dielectric, and a board (2) supporting the optical waveguide (1) laminated on the board (2). The optical waveguide (1) is composed of a core (8) through which a light is transmitted and a cladding (9) whose refractive index is smaller than that of the core (8).
信息查询
0/0