发明公开
- 专利标题: OPTICAL WAVEGUIDE PROBE AND ITS MANUFACTURING METHOD
- 专利标题(中): 光纤探测器的制作工艺
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申请号: EP98959218申请日: 1998-12-15
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公开(公告)号: EP0964251A4公开(公告)日: 2002-04-10
- 发明人: SATO KAZUO , SHIKITA MITSUHIRO , KATO KENJI , SHINOGI MASATAKA , NAKAJIMA KUNIO , CHIBA NORIO , ICHIHARA SUSUMU , NIWA TAKASHI , MITSUOKA YASUYUKI , KASAMA NOBUYUKI
- 申请人: SEIKO INSTR INC
- 专利权人: SEIKO INSTR INC
- 当前专利权人: SEIKO INSTR INC
- 优先权: JP34539797 1997-12-15; JP21578098 1998-07-30
- 主分类号: G01B11/30
- IPC分类号: G01B11/30 ; G01Q10/00 ; G01Q60/06 ; G01Q60/18 ; G01Q60/22 ; G01Q60/24 ; G01Q60/38 ; G02B6/12 ; G02B6/24 ; G01N37/00 ; G01B7/34 ; G02B21/00
摘要:
An optical waveguide probe which is formed into a hook shape by a manufacturing method using a silicon process and which emits a light from its tip for detection, comprising an optical waveguide (1) which is formed into a hook shape, the probe needle part (5) of which is sharpened and which is made of dielectric, and a board (2) supporting the optical waveguide (1) laminated on the board (2). The optical waveguide (1) is composed of a core (8) through which a light is transmitted and a cladding (9) whose refractive index is smaller than that of the core (8).
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