发明公开
EP0971000A1 ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS
失效
电子/电器,其用在处理基材的洁净室和设备
- 专利标题: ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS
- 专利标题(中): 电子/电器,其用在处理基材的洁净室和设备
-
申请号: EP98910973.1申请日: 1998-03-25
-
公开(公告)号: EP0971000A1公开(公告)日: 2000-01-12
- 发明人: MATSUO, Takenobu , WAKABAYASHI, Tsuyoshi , SAITO, Misako , KOBAYASHI, Sadao , WAKAYAMA, Yoshihide , IMAFUKU, Masayuki
- 申请人: Tokyo Electron Limited , Taisei Corporation
- 申请人地址: 3-6 Akasaka, 5-chome, Minato-ku Tokyo 107-8481 JP
- 专利权人: Tokyo Electron Limited,Taisei Corporation
- 当前专利权人: Tokyo Electron Limited,Taisei Corporation
- 当前专利权人地址: 3-6 Akasaka, 5-chome, Minato-ku Tokyo 107-8481 JP
- 代理机构: Liesegang, Roland, Dr.-Ing.
- 优先权: JP7120197 19970325
- 国际公布: WO9842783 19981001
- 主分类号: C08L101/00
- IPC分类号: C08L101/00 ; C08K5/13 ; C08K5/05
摘要:
An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.
公开/授权文献
信息查询