公开(公告)号：EP0957514A1

公开(公告)日：1999-11-17

申请号：EP97908518.0

申请日：1997-03-27

申请人： TOKYO ELECTRON LIMITED ,  TAISEI CORPORATION

发明人： SAITO, Misako ,  MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： H01L21/68 ,  A43B3/00 ,  A41D13/02

CPC分类号： H01L21/67757 ,  A43B1/14 ,  A43B3/163 ,  H01L21/67 ,  H01L21/67366 ,  H01L21/67396

摘要： There are instruments used for handling a substrate in a clean room at room temperature and atmospheric pressure, which contain a resin base and at least one additive selected from the group consisting of a lubricant, a plasticizer, an anti-oxidizing agent and an antistatic agent, and the additives do not generate gaseous organic material compound under conditions of room temperature and atmospheric pressure.

摘要翻译： 在室温和大气压下在洁净室内处理基材的仪器包含树脂基材和至少一种选自润滑剂，增塑剂，抗氧化剂和抗静电剂的添加剂 ，并且添加剂在室温和大气压条件下不产生气体有机材料化合物。

公开(公告)号：EP0971000B1

公开(公告)日：2004-08-25

申请号：EP98910973.1

申请日：1998-03-25

申请人： Tokyo Electron Limited ,  Taisei Corporation

发明人： MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  SAITO, Misako ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： C08L101/00 ,  C08K5/13 ,  C08K5/05 ,  H01L21/02

CPC分类号： C08K5/0075

公开(公告)号：EP1400761A1

公开(公告)日：2004-03-24

申请号：EP02741307.9

申请日：2002-06-26

申请人： Nichias Co., Ltd. ,  TOKYO ELECTRON LIMITED ,  Taisei Corporation

发明人： TERADA, I., Nichias Co. Ltd., Tsurumi Res. Lab. ,  TANAKA, M., Nichias Co. Ltd., Tsurumi Res. Lab. ,  MATUMURA, YM., Nichias Co. Ltd., Tsurumi Res. Lab. ,  KOBAYASHI, Sadao ,  MORI, Naoki, c/o TAISEI CORPORATION ,  ITOH, Hiromu, c/o TAISEI CORPORATION ,  WAKAYAMA, Yoshihide, c/o TAISEI CORPORATION ,  SUENAGA, Osamu, c/o TOKYO ELECTRON LIMITED

IPC分类号： F24F7/06

CPC分类号： F24F3/14 ,  B01D47/00 ,  B01D53/75 ,  F24F2003/1617 ,  Y02A50/21

摘要： A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means.

摘要翻译： 一种清洁空气的方法，包括加湿步骤，用于通过加湿装置加湿包含化学污染物的空气，并将一部分空气中的气态污染物吸入过量的水分以除去空气中的污染物;以及除湿步骤，用于对加湿的 通过冷凝装置将空气除去，并且在加湿步骤中将没有被除去的气态化学污染物留在冷凝水中以除去，其中，通过使用具有前表面和后表面以及设置成打开状态的上下两面的倾斜蜂窝体 从倾斜蜂窝的前开口部分引出空气，水从其上部开口部分输送到加湿冷凝装置中的一个或两个。

公开(公告)号：EP0971000A1

公开(公告)日：2000-01-12

申请号：EP98910973.1

申请日：1998-03-25

申请人： Tokyo Electron Limited ,  Taisei Corporation

发明人： MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  SAITO, Misako ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： C08L101/00 ,  C08K5/13 ,  C08K5/05

CPC分类号： C08K5/0075

摘要： An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.

摘要翻译： 在洁净室中，其中所述气氛控制为处理基板在半导体器件行业，其中包含加入到树脂基体材料的树脂基体材料和添加剂中使用的电子/电气部件。 所述添加剂包含选自抗静电剂组成的组中取得的350或更高的抗氧化剂，分子量的非离子性化合物中选择的一种或多种材料制成的300或更高的分子量的酚化合物的 ，润滑剂，增塑剂，阻燃剂和防水剂。 添加剂几乎不释放气态有机物质从树脂基材，在使用零件的条件下。

公开(公告)号：EP1400761A8

公开(公告)日：2004-06-02

申请号：EP02741307.9

申请日：2002-06-26

申请人： Nichias Co., Ltd. ,  TOKYO ELECTRON LIMITED

发明人： TERADA, I., Nichias Co. Ltd., Tsurumi Res. Lab. ,  TANAKA, M., Nichias Co. Ltd., Tsurumi Res. Lab. ,  MATUMURA, Y., Nichias Co. Ltd., Tsurumi Res. Lab. ,  KOBAYASHI, Sadao ,  MORI, Naoki, c/o TAISEI CORPORATION ,  ITOH, Hiromu, c/o TAISEI CORPORATION ,  WAKAYAMA, Yoshihide, c/o TAISEI CORPORATION ,  SUENAGA, Osamu, c/o TOKYO ELECTRON LIMITED

IPC分类号： F24F7/06

CPC分类号： F24F3/14 ,  B01D47/00 ,  B01D53/75 ,  F24F2003/1617 ,  Y02A50/21

摘要： A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means.

摘要翻译： 1.一种清洁空气的方法，包括用加湿装置加湿含有化学污染物的空气并将空气中的一部分气体污染物带入过量的水分以除去空气中的污染物的加湿步骤和除湿加湿装置的除湿步骤 通过冷凝装置将空气中的气体化学污染物在加湿步骤中不被除去而留在冷凝水中去除，其中通过使用具有前后表面和上表面和下表面均设置成打开状态的倾斜蜂窝 空气从倾斜蜂窝的前部开口部分被引导，并且水从其上部开口部分被供给到加湿和冷凝装置中的一个或两个。

公开(公告)号：EP1400761B1

公开(公告)日：2010-05-12

申请号：EP02741307.9

申请日：2002-06-26

申请人： Nichias Co., Ltd. ,  TOKYO ELECTRON LIMITED

发明人： TERADA, Isao ,  TANAKA, Minoru ,  MATUMURA, Yuji ,  KOBAYASHI, Sadao ,  MORI, Naoki ,  ITOH, Hiromu ,  WAKAYAMA, Yoshihide ,  SUENAGA, Osamu

IPC分类号： F24F7/06 ,  F24F3/14 ,  B01D53/75

CPC分类号： F24F3/14 ,  B01D47/00 ,  B01D53/75 ,  F24F2003/1617 ,  Y02A50/21

摘要： A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means.