发明公开
EP0977267A1 Non volatile memory structure and corresponding manufacturing process
失效
NichtflüchtigeSpeicherstruktur und das entsprechende Herstellungsverfahren
- 专利标题: Non volatile memory structure and corresponding manufacturing process
- 专利标题(中): NichtflüchtigeSpeicherstruktur und das entsprechende Herstellungsverfahren
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申请号: EP98202563.7申请日: 1998-07-30
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公开(公告)号: EP0977267A1公开(公告)日: 2000-02-02
- 发明人: Dalla Libera, Giovanna , Pio, Federico
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: Via C. Olivetti, 2 20041 Agrate Brianza (Milano) IT
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: Via C. Olivetti, 2 20041 Agrate Brianza (Milano) IT
- 代理机构: Botti, Mario
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L29/788 ; H01L21/8247 ; H01L21/336
摘要:
The invention relates to non-volatile memory structure integrated on a semiconductor substrate and including a plurality of memory cells (1) each comprising a floating gate transistor having an active area (9) and source/drain (16, 17) regions as well as a control gate coupled to the floating gate, the floating gate transistor being serially connected to a selection transistor. According to the invention a contact (7) is provided on the control gate over the active area (9). The contact is substantially aligned to the central portion of the active area but may even be realized over double-poly wings (18, 19) of the gate region located asymmetrically with respect to the active area.
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