发明公开
EP0979415A1 MANIPULATOR WITH EXPANDED RANGE OF MOTION 失效
扩大运动范围的机器人

MANIPULATOR WITH EXPANDED RANGE OF MOTION
摘要:
A tester includes a manipulator (200) attached to a test head (1) for testing semiconductor devices having a range of motion in mutiple degrees of freedom. Vertical (500) and horizontal (600) bearing assemblies, an expansion joint (400), a swing arm (40), a tumble assembly (700) coupled by a rotary bearing assembly (300) to the swing arm provide for lateral movement of the test head in three dimensions as well as angular movement of the test head in horizontal, tumble or twist rotations.
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