发明公开
- 专利标题: MANIPULATOR WITH EXPANDED RANGE OF MOTION
- 专利标题(中): 扩大运动范围的机器人
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申请号: EP98918921.2申请日: 1998-04-30
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公开(公告)号: EP0979415A1公开(公告)日: 2000-02-16
- 发明人: KHATER, Nabil , BAKER, David, A.
- 申请人: CREDENCE SYSTEMS CORPORATION
- 申请人地址: 215 Fourier Avenue Fremont, CA 94539 US
- 专利权人: CREDENCE SYSTEMS CORPORATION
- 当前专利权人: CREDENCE SYSTEMS CORPORATION
- 当前专利权人地址: 215 Fourier Avenue Fremont, CA 94539 US
- 代理机构: Swindell & Pearson
- 优先权: US846691 19970430
- 国际公布: WO9849569 19981105
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A tester includes a manipulator (200) attached to a test head (1) for testing semiconductor devices having a range of motion in mutiple degrees of freedom. Vertical (500) and horizontal (600) bearing assemblies, an expansion joint (400), a swing arm (40), a tumble assembly (700) coupled by a rotary bearing assembly (300) to the swing arm provide for lateral movement of the test head in three dimensions as well as angular movement of the test head in horizontal, tumble or twist rotations.
公开/授权文献
- EP0979415B1 MANIPULATOR WITH EXPANDED RANGE OF MOTION 公开/授权日:2004-07-14
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