发明公开
EP0991087A2 Soft magnetic thin film, soft magnetic multi-layered film, producing method thereof and magnetic device using them 审中-公开
使用软磁性膜,多层软磁性膜,制造工艺和磁性组件,例如

Soft magnetic thin film, soft magnetic multi-layered film, producing method thereof and magnetic device using them
摘要:
The present invention provides a soft magnetic film having high saturation magnetic flux density and an excellent soft magnetic property in a high-frequency bandwidth of not less than several hundred MHz. The soft magnetic film contains Fe as a main component and M (at least one kind of element selected from 4A-group element, 5A-group element and 6A-group element), at least one of selected from Pt and Pd, and N.
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