发明授权
- 专利标题: LOW COST CMOS TESTER WITH HIGH CHANNEL DENSITY
- 专利标题(中): 具有高通道密度低成本CMOS测试仪
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申请号: EP98935953.4申请日: 1998-07-22
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公开(公告)号: EP1000364B1公开(公告)日: 2002-10-23
- 发明人: SARTSCHEV, Ronald, A. , MUETHING, Gerald, F., Jr.
- 申请人: TERADYNE, INC.
- 申请人地址: 321 Harrison Avenue Boston, Massachusetts 02118 US
- 专利权人: TERADYNE, INC.
- 当前专利权人: TERADYNE, INC.
- 当前专利权人地址: 321 Harrison Avenue Boston, Massachusetts 02118 US
- 代理机构: Luckhurst, Anthony Henry William
- 优先权: US906532 19970805
- 国际公布: WO99008125 19990218
- 主分类号: G01R31/319
- IPC分类号: G01R31/319 ; H03K5/13
摘要:
Automatic test equipment for testing semiconductor devices equipment includes a) a clock; b) a delay line comprised of a plurality of delay stages (212), each delay stage (212) having an input and an output and a control input, with the input of the first delay stage (212(0)) coupled to the clock and the input of every other delay stage coupled to the output of the preceding stage in the delay line; said automatic test equipment characterised by: c) a phase detector (214) having a first input coupled to an output of a delay stage in the delay line and in an input coupled to the output of a prior delay stage in the delay line; and d) a control circuit (216) having an input coupled to the output of the phase detector and an output connected to the control inputs of each of the delay stages in the delay line.
公开/授权文献
- EP1000364A1 LOW COST CMOS TESTER WITH HIGH CHANNEL DENSITY 公开/授权日:2000-05-17
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