Thin layer capacitors are formed from a first flexible metal layer (402,502), a dielectric layer (404,504) between about 0.03 and about 2 microns deposited thereon, and a second flexible metal layer (406,506) deposited on the dielectric layer (404,504). The first flexible metal layer may either be a metal foil (402), such as a copper, aluminum, or nickel foil, or a metal layer (502) deposited on a polymeric support sheet (501). Depositions of the layers is by or is facilitate by combustion chemical vapor deposition or controlled atmosphere chemical vapor deposition.