发明授权
- 专利标题: PROJEKTIONS-BELICHTUNGSANLAGE DER MIKROLITHOGRAPHIE
- 专利标题(英): Projection light facility for microlithography
- 专利标题(中): 微光刻投影曝光系统
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申请号: EP99929277.4申请日: 1999-06-18
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公开(公告)号: EP1015931B1公开(公告)日: 2006-03-29
- 发明人: GABER, Erwin , WAGNER, Christian , HOLDERER, Hubert , GERHARD, Michael , MERZ, Erich , BECKER, Jochen , SCHEIBERLICH, Arie, Cormelis
- 申请人: Carl Zeiss SMT AG
- 申请人地址: Carl-Zeiss-Strasse 22 73446 Oberkochen DE
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: Carl-Zeiss-Strasse 22 73446 Oberkochen DE
- 代理机构: Ostertag, Ulrich
- 优先权: DE19827603 19980620
- 国际公布: WO1999067683 19991229
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B26/06 ; G03F7/20
摘要:
The invention relates to an optical system, especially a projection light facility for microlithography, especially with an image field shaped as a slit or with non rotational symmetry illumination, comprising an optical element (1), especially a lens or a mirror, which is arranged in a mount (2) and actuators (3) which engage with the optical element (1) at least nearly perpendicular to the optical axis. The actuators (3) effect non rotational symmetric forces and/or moments deviating from the radial lines in the optical element (1) to generate deformations with substantially no changes in thickness. Image errors arising as a result of asymmetric heating of the optical system are compensated for by deformation of the optical element.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |