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EP1017109A3 Method of fabricating a film for solar cells 有权
一种用于制造用于太阳能电池的层的方法

Method of fabricating a film for solar cells
摘要:
A method of fabricating Cuα(In x Ga 1-x )β(Se y S 1-y )γ films for solar cells includes forming an electrode on a substrate and supplying the substrate and electrode with Cu, In, Ga, Se, and S to form a Cuα(In x Ga 1-x )β(Se y S 1-y )γ film. Simultaneously with the supplying of Cu, In, Ga, Se and S, the substrate is supplied with water vapor or a gas that contains a hydroxyl group.
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