公开(公告)号：EP1017109A3

公开(公告)日：2000-10-25

申请号：EP99307955.7

申请日：1999-10-08

申请人： Agency of Industrial Science and Technology of Ministry of International Trade and Industry

发明人： Niki, Shigeru ,  Yamada, Akimasa ,  Fons, Paul ,  Oyanagi, Hiroyuki

IPC分类号： H01L31/00 ,  H01L31/032 ,  H01L31/0336 ,  H01L31/0272

CPC分类号： H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A method of fabricating Cuα(In x Ga 1-x )β(Se y S 1-y )γ films for solar cells includes forming an electrode on a substrate and supplying the substrate and electrode with Cu, In, Ga, Se, and S to form a Cuα(In x Ga 1-x )β(Se y S 1-y )γ film. Simultaneously with the supplying of Cu, In, Ga, Se and S, the substrate is supplied with water vapor or a gas that contains a hydroxyl group.

公开(公告)号：EP1017109A2

公开(公告)日：2000-07-05

申请号：EP99307955.7

申请日：1999-10-08

申请人： Agency of Industrial Science and Technology of Ministry of International Trade and Industry

发明人： Niki, Shigeru ,  Yamada, Akimasa ,  Fons, Paul ,  Oyanagi, Hiroyuki

IPC分类号： H01L31/00

CPC分类号： H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A method of fabricating Cuα(In x Ga 1-x )β(Se y S 1-y )γ films for solar cells includes forming an electrode on a substrate and supplying the substrate and electrode with Cu, In, Ga, Se, and S to form a Cuα(In x Ga 1-x )β(Se y S 1-y )γ film. Simultaneously with the supplying of Cu, In, Ga, Se and S, the substrate is supplied with water vapor or a gas that contains a hydroxyl group.

摘要翻译： 制造用于太阳能电池的Cuα（In x Ga 1-x）β（SeyS 1-y）γ膜的方法包括在基板上形成电极，并向Cu，In，Ga，Se和S提供衬底和电极以形成Cu α（In x Ga 1-x）β（SeyS 1-y）γ膜。 与Cu，In，Ga，Se和S的供给同时，向基板供给水蒸气或含有羟基的气体。