发明公开
EP1018765A3 Crack stop between neighbouring fuses for protection from fuse blow damage
审中-公开
裂纹相邻熔丝之间的断路器,以保护免受损坏熔断器
- 专利标题: Crack stop between neighbouring fuses for protection from fuse blow damage
- 专利标题(中): 裂纹相邻熔丝之间的断路器,以保护免受损坏熔断器
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申请号: EP99126273.4申请日: 1999-12-31
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公开(公告)号: EP1018765A3公开(公告)日: 2003-08-27
- 发明人: Narayan, Chandrasekhar , Kiewra, Edward , Radens, Carl , Brintzinger, Axel
- 申请人: International Business Machines Corporation , Infineon Technologies AG
- 申请人地址: New Orchard Road Armonk, NY 10504 US
- 专利权人: International Business Machines Corporation,Infineon Technologies AG
- 当前专利权人: International Business Machines Corporation,Infineon Technologies AG
- 当前专利权人地址: New Orchard Road Armonk, NY 10504 US
- 代理机构: Teufel, Fritz, Dipl.-Phys.
- 优先权: US223826 19990104
- 主分类号: H01L23/525
- IPC分类号: H01L23/525
摘要:
A fuse structure in an integrated circuit chip is described that includes an insulated semiconductor substrate; a fuse bank integral to the insulated semiconductor substrate consisting of a plurality of parallel co-planar fuse links; and voids interspersed between each pair of the fuse links, the voids extending beyond a plane defined by the co-planar fuse links. The voids surrounding the spot to be hit by a laser beam during fuse blow operation act as a crack stop to prevent damage to adjacent circuit elements or other fuse links present. By suitably shaping and positioning the voids, a tighter pitch between fuses may be obtained.
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