发明公开
EP1018765A3 Crack stop between neighbouring fuses for protection from fuse blow damage 审中-公开
裂纹相邻熔丝之间的断路器,以保护免受损坏熔断器

Crack stop between neighbouring fuses for protection from fuse blow damage
摘要:
A fuse structure in an integrated circuit chip is described that includes an insulated semiconductor substrate; a fuse bank integral to the insulated semiconductor substrate consisting of a plurality of parallel co-planar fuse links; and voids interspersed between each pair of the fuse links, the voids extending beyond a plane defined by the co-planar fuse links. The voids surrounding the spot to be hit by a laser beam during fuse blow operation act as a crack stop to prevent damage to adjacent circuit elements or other fuse links present. By suitably shaping and positioning the voids, a tighter pitch between fuses may be obtained.
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