发明公开
- 专利标题: TRANSPARENT CONDUCTIVE LAMINATE, ITS MANUFACTURING METHOD, AND DISPLAY COMPRISING TRANSPARENT CONDUCTIVE LAMINATE
- 专利标题(中): 透明导电层合体及其制造方法及显示装置有透明导电层压板
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申请号: EP00905291申请日: 2000-02-23
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公开(公告)号: EP1081718A4公开(公告)日: 2003-07-30
- 发明人: HARA HIROSHI , TSUBOI SEIJI
- 申请人: TEIJIN LTD
- 专利权人: TEIJIN LTD
- 当前专利权人: TEIJIN LTD
- 优先权: JP4615699 1999-02-24
- 主分类号: B32B9/00
- IPC分类号: B32B9/00 ; C23C14/00 ; C23C14/08 ; C23C14/34 ; C23C14/58 ; H01B5/14 ; B32B7/02 ; H01L31/04
摘要:
A transparent conductive laminate in which a crystalline transparent conductive film substantially made of In-Sn-O is formed on the transparent substrate composed of a thermoplastic polymer film. The crystalline part of the transparent conductive film (ITO film) is a transparent conductive laminate having a special crystal structure in which the strength of X-rays diffracted by the (222) crystal plane or the (440) crystal plane is the highest and the ratio [X440/222] of the strength of X-rays diffracted by the (440) crystal plane to that by the (222) crystal plane is within a range of 0.2 to 2.5. The transparent conductive laminate is low in surface resistivity and useful as an electrode material such as of a liquid crystal display, an electroluminescence device, or a touch panel. The transparent conductive laminate is manufactured by a combination of control of the film-forming atmosphere in sputtering and heat treatment under specific conditions after the film is formed.
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