发明公开
- 专利标题： Method and apparatus for dechucking a workpiece from an electrostatic chuck
- 专利标题（中）： 从静电卡盘快速释放工件的方法
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申请号： EP01300467.6申请日： 2001-01-19
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公开(公告)号： EP1118425A2公开(公告)日： 2001-07-25
- 发明人: Lesser, Karl F.
- 申请人： APPLIED MATERIALS, INC.
- 申请人地址： 3050 Bowers Avenue, M/S 2061 Santa Clara, California 95052 US
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： 3050 Bowers Avenue, M/S 2061 Santa Clara, California 95052 US
- 代理机构： Bayliss, Geoffrey Cyril
- 优先权： US489458 20000121
- 主分类号： B23Q3/15
- IPC分类号： B23Q3/15 ; H01L21/08
摘要：
A method and apparatus that provides a dechucking voltage applied to an electrostatic chuck (108) under the control of a computer (100) that facilitates removal of a workpiece or workpiece therefrom. The method incorporates residual chucking force information obtained from the preceding dechuck operation and stored in a memory (128) to modify and improve the dechucking algorithm for the subsequent wafer dechucking cycle. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.
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