公开(公告)号：EP1118425A2

公开(公告)日：2001-07-25

申请号：EP01300467.6

申请日：2001-01-19

申请人： APPLIED MATERIALS, INC.

发明人： Lesser, Karl F.

IPC分类号： B23Q3/15 ,  H01L21/08

CPC分类号： H02N13/00 ,  B23Q3/154 ,  H01J2237/2007 ,  H01L21/6831 ,  H01L21/6833

摘要： A method and apparatus that provides a dechucking voltage applied to an electrostatic chuck (108) under the control of a computer (100) that facilitates removal of a workpiece or workpiece therefrom. The method incorporates residual chucking force information obtained from the preceding dechuck operation and stored in a memory (128) to modify and improve the dechucking algorithm for the subsequent wafer dechucking cycle. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.

摘要翻译： 的方法和设备没有提供一种应用于在计算机的控制下，静电卡盘（108）（100）中的脱离电压确实有助于除去从那里工件或工件的。 该方法结合了来自preceding-去夹持操作和存储于存储器（128）进行修改和改进对随后的晶片去夹紧周期去夹紧算法获得的残余夹紧力信息。 为了避免在静电吸盘的电荷累积在处理的工件连续，夹持和去夹紧电压反极性每个工件dechucked之后。

公开(公告)号：EP1118425A3

公开(公告)日：2004-02-04

申请号：EP01300467.6

申请日：2001-01-19

申请人： APPLIED MATERIALS, INC.

发明人： Lesser, Karl F.

IPC分类号： H01L21/68 ,  B23Q3/154 ,  H01L21/00 ,  H02N13/00

CPC分类号： H02N13/00 ,  B23Q3/154 ,  H01J2237/2007 ,  H01L21/6831 ,  H01L21/6833

摘要： A method and apparatus that provides a dechucking voltage applied to an electrostatic chuck (108) under the control of a computer (100) that facilitates removal of a workpiece or workpiece therefrom. The method incorporates residual chucking force information obtained from the preceding dechuck operation and stored in a memory (128) to modify and improve the dechucking algorithm for the subsequent wafer dechucking cycle. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.