发明公开
EP1118836A3 Capacitive micro sensor, gyroscope, and input device 审中-公开
Kapazitiver Mikrosensor,Kreisel und Eingabevorrichtung

Capacitive micro sensor, gyroscope, and input device
摘要:
The invention provides a capacitive micro sensor that suppresses electric noises generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork (6) having three legs (9), driving electrodes (4) and detecting electrodes (5) provided on two glass substrates (2, 3), driving fields-through (7) that supply the driving electrodes with a drive signal, and detecting fields-through (8) that extract a detecting signal from the detecting electrodes. There is also provided a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent fields-through of the areas where the driving fields-through and the detecting fields-through are arrayed.
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