发明公开
EP1118836A3 Capacitive micro sensor, gyroscope, and input device
审中-公开
Kapazitiver Mikrosensor,Kreisel und Eingabevorrichtung
- 专利标题: Capacitive micro sensor, gyroscope, and input device
- 专利标题(中): Kapazitiver Mikrosensor,Kreisel und Eingabevorrichtung
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申请号: EP00310972.5申请日: 2000-12-08
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公开(公告)号: EP1118836A3公开(公告)日: 2004-12-08
- 发明人: Abe, Munemitsu, c/o Alps Electric Co., Ltd. , Shinohara, Eiji, c/o Alps Electric Co., Ltd. , Esashi, Masayoshi
- 申请人: ALPS ELECTRIC CO., LTD. , ESASHI, Masayoshi
- 申请人地址: 1-7 Yukigaya Otsuka-cho Ota-ku Tokyo 145 JP
- 专利权人: ALPS ELECTRIC CO., LTD.,ESASHI, Masayoshi
- 当前专利权人: ALPS ELECTRIC CO., LTD.,ESASHI, Masayoshi
- 当前专利权人地址: 1-7 Yukigaya Otsuka-cho Ota-ku Tokyo 145 JP
- 代理机构: Kensett, John Hinton
- 优先权: JP2000010693 20000119
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
The invention provides a capacitive micro sensor that suppresses electric noises generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork (6) having three legs (9), driving electrodes (4) and detecting electrodes (5) provided on two glass substrates (2, 3), driving fields-through (7) that supply the driving electrodes with a drive signal, and detecting fields-through (8) that extract a detecting signal from the detecting electrodes. There is also provided a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent fields-through of the areas where the driving fields-through and the detecting fields-through are arrayed.
公开/授权文献
- EP1118836A2 Capacitive micro sensor, gyroscope, and input device 公开/授权日:2001-07-25
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